2/12/2013	6:00:16 AM	Helium valve closed
2/12/2013	6:00:16 AM	H2 valve closed
2/12/2013	6:00:16 AM	BCl3 valve closed
2/12/2013	6:00:16 AM	PH3 valve closed
2/12/2013	6:00:16 AM	SiCl4 pre valve closed
2/12/2013	6:00:16 AM	SiCl4 post valve closed
2/12/2013	6:00:16 AM	Main Vac valve closed
2/12/2013	6:00:16 AM	Bypass valve closed
2/12/2013	6:00:16 AM	Bubbler valve closed
2/12/2013	6:00:16 AM	Helium MFC set to  0.000000
2/12/2013	6:00:16 AM	H2 MFC set to  0.000000
2/12/2013	6:00:16 AM	BCl3 MFC set to  0.000000
2/12/2013	6:00:16 AM	PH3 MFC set to  0.000000
2/12/2013	6:00:16 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:00:16 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:00:16 AM	Tube furnace set to 0
2/12/2013	6:00:19 AM	Helium valve closed
2/12/2013	6:00:19 AM	BCl3 valve closed
2/12/2013	6:00:19 AM	PH3 valve closed
2/12/2013	6:00:19 AM	SiCl4 pre valve closed
2/12/2013	6:00:19 AM	SiCl4 post valve closed
2/12/2013	6:00:19 AM	Main Vac valve closed
2/12/2013	6:00:19 AM	Bypass valve closed
2/12/2013	6:00:19 AM	Bubbler valve closed
2/12/2013	6:00:19 AM	H2 valve opened
2/12/2013	6:00:19 AM	Helium MFC set to  0.000000
2/12/2013	6:00:19 AM	H2 MFC set to  500.000000
2/12/2013	6:00:19 AM	BCl3 MFC set to  0.000000
2/12/2013	6:00:19 AM	PH3 MFC set to  0.000000
2/12/2013	6:00:19 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:00:19 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:00:20 AM	Tube furnace set to 0
2/12/2013	6:01:31 AM	Helium valve closed
2/12/2013	6:01:31 AM	BCl3 valve closed
2/12/2013	6:01:31 AM	PH3 valve closed
2/12/2013	6:01:31 AM	SiCl4 pre valve closed
2/12/2013	6:01:31 AM	SiCl4 post valve closed
2/12/2013	6:01:31 AM	Main Vac valve closed
2/12/2013	6:01:31 AM	Bypass valve closed
2/12/2013	6:01:31 AM	H2 valve opened
2/12/2013	6:01:31 AM	Bubbler valve opened
2/12/2013	6:01:31 AM	Helium MFC set to  0.000000
2/12/2013	6:01:31 AM	H2 MFC set to  500.000000
2/12/2013	6:01:31 AM	BCl3 MFC set to  0.000000
2/12/2013	6:01:31 AM	PH3 MFC set to  0.000000
2/12/2013	6:01:31 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:01:31 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:01:31 AM	Tube furnace set to 0
2/12/2013	6:01:32 AM	Helium valve closed
2/12/2013	6:01:32 AM	BCl3 valve closed
2/12/2013	6:01:32 AM	PH3 valve closed
2/12/2013	6:01:32 AM	SiCl4 pre valve closed
2/12/2013	6:01:32 AM	SiCl4 post valve closed
2/12/2013	6:01:32 AM	Main Vac valve closed
2/12/2013	6:01:32 AM	Bypass valve closed
2/12/2013	6:01:32 AM	H2 valve opened
2/12/2013	6:01:32 AM	Bubbler valve opened
2/12/2013	6:01:32 AM	Helium MFC set to  0.000000
2/12/2013	6:01:32 AM	H2 MFC set to  500.000000
2/12/2013	6:01:32 AM	BCl3 MFC set to  0.000000
2/12/2013	6:01:32 AM	PH3 MFC set to  0.000000
2/12/2013	6:01:32 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:01:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:01:32 AM	Tube furnace set to 1000
2/12/2013	6:21:32 AM	Helium valve closed
2/12/2013	6:21:32 AM	PH3 valve closed
2/12/2013	6:21:32 AM	Main Vac valve closed
2/12/2013	6:21:32 AM	Bypass valve closed
2/12/2013	6:21:32 AM	H2 valve opened
2/12/2013	6:21:32 AM	BCl3 valve opened
2/12/2013	6:21:32 AM	SiCl4 pre valve opened
2/12/2013	6:21:32 AM	SiCl4 post valve opened
2/12/2013	6:21:32 AM	Bubbler valve opened
2/12/2013	6:21:32 AM	Helium MFC set to  0.000000
2/12/2013	6:21:32 AM	H2 MFC set to  450.000000
2/12/2013	6:21:32 AM	BCl3 MFC set to  1.300000
2/12/2013	6:21:32 AM	PH3 MFC set to  0.000000
2/12/2013	6:21:32 AM	SiCl4 MFC set to  50.000000
2/12/2013	6:21:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:21:33 AM	Tube furnace set to 1000
2/12/2013	6:41:33 AM	Helium valve closed
2/12/2013	6:41:33 AM	BCl3 valve closed
2/12/2013	6:41:33 AM	PH3 valve closed
2/12/2013	6:41:33 AM	SiCl4 pre valve closed
2/12/2013	6:41:33 AM	SiCl4 post valve closed
2/12/2013	6:41:33 AM	Main Vac valve closed
2/12/2013	6:41:33 AM	Bypass valve closed
2/12/2013	6:41:33 AM	H2 valve opened
2/12/2013	6:41:33 AM	Bubbler valve opened
2/12/2013	6:41:33 AM	Helium MFC set to  0.000000
2/12/2013	6:41:33 AM	H2 MFC set to  500.000000
2/12/2013	6:41:33 AM	BCl3 MFC set to  0.000000
2/12/2013	6:41:33 AM	PH3 MFC set to  0.000000
2/12/2013	6:41:33 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:41:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:41:33 AM	Tube furnace set to 900
2/12/2013	6:46:33 AM	Helium valve closed
2/12/2013	6:46:33 AM	BCl3 valve closed
2/12/2013	6:46:33 AM	PH3 valve closed
2/12/2013	6:46:33 AM	SiCl4 pre valve closed
2/12/2013	6:46:33 AM	SiCl4 post valve closed
2/12/2013	6:46:33 AM	Main Vac valve closed
2/12/2013	6:46:33 AM	Bypass valve closed
2/12/2013	6:46:33 AM	H2 valve opened
2/12/2013	6:46:33 AM	Bubbler valve opened
2/12/2013	6:46:33 AM	Helium MFC set to  0.000000
2/12/2013	6:46:33 AM	H2 MFC set to  500.000000
2/12/2013	6:46:33 AM	BCl3 MFC set to  0.000000
2/12/2013	6:46:33 AM	PH3 MFC set to  0.000000
2/12/2013	6:46:33 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:46:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:46:33 AM	Tube furnace set to 800
2/12/2013	6:51:33 AM	Helium valve closed
2/12/2013	6:51:33 AM	BCl3 valve closed
2/12/2013	6:51:33 AM	PH3 valve closed
2/12/2013	6:51:33 AM	SiCl4 pre valve closed
2/12/2013	6:51:33 AM	SiCl4 post valve closed
2/12/2013	6:51:33 AM	Main Vac valve closed
2/12/2013	6:51:33 AM	Bypass valve closed
2/12/2013	6:51:33 AM	H2 valve opened
2/12/2013	6:51:33 AM	Bubbler valve opened
2/12/2013	6:51:33 AM	Helium MFC set to  0.000000
2/12/2013	6:51:33 AM	H2 MFC set to  500.000000
2/12/2013	6:51:33 AM	BCl3 MFC set to  0.000000
2/12/2013	6:51:33 AM	PH3 MFC set to  0.000000
2/12/2013	6:51:33 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:51:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:51:33 AM	Tube furnace set to 700
2/12/2013	6:56:33 AM	Helium valve closed
2/12/2013	6:56:33 AM	BCl3 valve closed
2/12/2013	6:56:33 AM	PH3 valve closed
2/12/2013	6:56:33 AM	SiCl4 pre valve closed
2/12/2013	6:56:33 AM	SiCl4 post valve closed
2/12/2013	6:56:33 AM	Main Vac valve closed
2/12/2013	6:56:33 AM	Bypass valve closed
2/12/2013	6:56:33 AM	H2 valve opened
2/12/2013	6:56:33 AM	Bubbler valve opened
2/12/2013	6:56:33 AM	Helium MFC set to  0.000000
2/12/2013	6:56:33 AM	H2 MFC set to  500.000000
2/12/2013	6:56:33 AM	BCl3 MFC set to  0.000000
2/12/2013	6:56:33 AM	PH3 MFC set to  0.000000
2/12/2013	6:56:33 AM	SiCl4 MFC set to  0.000000
2/12/2013	6:56:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	6:56:33 AM	Tube furnace set to 600
2/12/2013	7:01:34 AM	H2 valve closed
2/12/2013	7:01:34 AM	BCl3 valve closed
2/12/2013	7:01:34 AM	PH3 valve closed
2/12/2013	7:01:34 AM	SiCl4 pre valve closed
2/12/2013	7:01:34 AM	SiCl4 post valve closed
2/12/2013	7:01:34 AM	Main Vac valve closed
2/12/2013	7:01:34 AM	Bypass valve closed
2/12/2013	7:01:34 AM	Helium valve opened
2/12/2013	7:01:34 AM	Bubbler valve opened
2/12/2013	7:01:34 AM	Helium MFC set to  500.000000
2/12/2013	7:01:34 AM	H2 MFC set to  0.000000
2/12/2013	7:01:34 AM	BCl3 MFC set to  0.000000
2/12/2013	7:01:34 AM	PH3 MFC set to  0.000000
2/12/2013	7:01:34 AM	SiCl4 MFC set to  0.000000
2/12/2013	7:01:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	7:01:34 AM	Tube furnace set to 0
2/12/2013	7:21:34 AM	Helium valve closed
2/12/2013	7:21:34 AM	H2 valve closed
2/12/2013	7:21:34 AM	BCl3 valve closed
2/12/2013	7:21:34 AM	PH3 valve closed
2/12/2013	7:21:34 AM	SiCl4 pre valve closed
2/12/2013	7:21:34 AM	SiCl4 post valve closed
2/12/2013	7:21:34 AM	Main Vac valve closed
2/12/2013	7:21:34 AM	Bypass valve closed
2/12/2013	7:21:34 AM	Bubbler valve closed
2/12/2013	7:21:34 AM	Helium MFC set to  0.000000
2/12/2013	7:21:34 AM	H2 MFC set to  0.000000
2/12/2013	7:21:34 AM	BCl3 MFC set to  0.000000
2/12/2013	7:21:34 AM	PH3 MFC set to  0.000000
2/12/2013	7:21:34 AM	SiCl4 MFC set to  0.000000
2/12/2013	7:21:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	7:21:34 AM	Tube furnace set to 0
2/12/2013	7:51:34 AM	Helium valve closed
2/12/2013	7:51:34 AM	H2 valve closed
2/12/2013	7:51:34 AM	BCl3 valve closed
2/12/2013	7:51:34 AM	PH3 valve closed
2/12/2013	7:51:34 AM	SiCl4 pre valve closed
2/12/2013	7:51:34 AM	SiCl4 post valve closed
2/12/2013	7:51:34 AM	Main Vac valve closed
2/12/2013	7:51:34 AM	Bubbler valve closed
2/12/2013	7:51:34 AM	Bypass valve opened
2/12/2013	7:51:34 AM	Helium MFC set to  0.000000
2/12/2013	7:51:34 AM	H2 MFC set to  0.000000
2/12/2013	7:51:34 AM	BCl3 MFC set to  0.000000
2/12/2013	7:51:34 AM	PH3 MFC set to  0.000000
2/12/2013	7:51:34 AM	SiCl4 MFC set to  0.000000
2/12/2013	7:51:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	7:51:34 AM	Tube furnace set to 0
2/12/2013	7:52:32 AM	Helium valve closed
2/12/2013	7:52:32 AM	H2 valve closed
2/12/2013	7:52:32 AM	BCl3 valve closed
2/12/2013	7:52:32 AM	PH3 valve closed
2/12/2013	7:52:32 AM	SiCl4 pre valve closed
2/12/2013	7:52:32 AM	SiCl4 post valve closed
2/12/2013	7:52:32 AM	Main Vac valve closed
2/12/2013	7:52:32 AM	Bubbler valve closed
2/12/2013	7:52:32 AM	Bypass valve opened
2/12/2013	7:52:32 AM	Helium MFC set to  0.000000
2/12/2013	7:52:32 AM	H2 MFC set to  0.000000
2/12/2013	7:52:32 AM	BCl3 MFC set to  0.000000
2/12/2013	7:52:32 AM	PH3 MFC set to  0.000000
2/12/2013	7:52:32 AM	SiCl4 MFC set to  0.000000
2/12/2013	7:52:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	7:52:32 AM	Tube furnace set to 0
2/12/2013	7:53:32 AM	Helium valve closed
2/12/2013	7:53:32 AM	H2 valve closed
2/12/2013	7:53:32 AM	BCl3 valve closed
2/12/2013	7:53:32 AM	PH3 valve closed
2/12/2013	7:53:32 AM	SiCl4 pre valve closed
2/12/2013	7:53:32 AM	SiCl4 post valve closed
2/12/2013	7:53:32 AM	Bypass valve closed
2/12/2013	7:53:32 AM	Bubbler valve closed
2/12/2013	7:53:32 AM	Main Vac valve opened
2/12/2013	7:53:32 AM	Helium MFC set to  0.000000
2/12/2013	7:53:32 AM	H2 MFC set to  0.000000
2/12/2013	7:53:32 AM	BCl3 MFC set to  0.000000
2/12/2013	7:53:32 AM	PH3 MFC set to  0.000000
2/12/2013	7:53:32 AM	SiCl4 MFC set to  0.000000
2/12/2013	7:53:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	7:53:32 AM	Tube furnace set to 0
2/12/2013	7:53:33 AM	Run finished at 7:53 AM
2/12/2013	9:54:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	9:54:39 AM	Recipe started at 9:54 AM
2/12/2013	9:54:40 AM	Helium valve closed
2/12/2013	9:54:40 AM	H2 valve closed
2/12/2013	9:54:40 AM	BCl3 valve closed
2/12/2013	9:54:40 AM	PH3 valve closed
2/12/2013	9:54:40 AM	SiCl4 pre valve closed
2/12/2013	9:54:40 AM	SiCl4 post valve closed
2/12/2013	9:54:40 AM	Main Vac valve closed
2/12/2013	9:54:40 AM	Bypass valve closed
2/12/2013	9:54:40 AM	Bubbler valve closed
2/12/2013	9:54:40 AM	Helium MFC set to  0.000000
2/12/2013	9:54:40 AM	H2 MFC set to  0.000000
2/12/2013	9:54:40 AM	BCl3 MFC set to  0.000000
2/12/2013	9:54:40 AM	PH3 MFC set to  0.000000
2/12/2013	9:54:40 AM	SiCl4 MFC set to  0.000000
2/12/2013	9:54:40 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	9:54:40 AM	Tube furnace set to 0
2/12/2013	9:54:43 AM	H2 valve closed
2/12/2013	9:54:43 AM	BCl3 valve closed
2/12/2013	9:54:43 AM	PH3 valve closed
2/12/2013	9:54:43 AM	SiCl4 pre valve closed
2/12/2013	9:54:43 AM	SiCl4 post valve closed
2/12/2013	9:54:43 AM	Main Vac valve closed
2/12/2013	9:54:43 AM	Bypass valve closed
2/12/2013	9:54:43 AM	Bubbler valve closed
2/12/2013	9:54:43 AM	Helium valve opened
2/12/2013	9:54:43 AM	Helium MFC set to  500.000000
2/12/2013	9:54:43 AM	H2 MFC set to  0.000000
2/12/2013	9:54:43 AM	BCl3 MFC set to  0.000000
2/12/2013	9:54:43 AM	PH3 MFC set to  0.000000
2/12/2013	9:54:43 AM	SiCl4 MFC set to  0.000000
2/12/2013	9:54:43 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	9:54:43 AM	Tube furnace set to 0
2/12/2013	9:55:55 AM	Helium valve closed
2/12/2013	9:55:55 AM	H2 valve closed
2/12/2013	9:55:55 AM	BCl3 valve closed
2/12/2013	9:55:55 AM	PH3 valve closed
2/12/2013	9:55:55 AM	SiCl4 pre valve closed
2/12/2013	9:55:55 AM	SiCl4 post valve closed
2/12/2013	9:55:55 AM	Main Vac valve closed
2/12/2013	9:55:55 AM	Bypass valve closed
2/12/2013	9:55:55 AM	Bubbler valve closed
2/12/2013	9:55:55 AM	Helium MFC set to  0.000000
2/12/2013	9:55:55 AM	H2 MFC set to  0.000000
2/12/2013	9:55:55 AM	BCl3 MFC set to  0.000000
2/12/2013	9:55:55 AM	PH3 MFC set to  0.000000
2/12/2013	9:55:55 AM	SiCl4 MFC set to  0.000000
2/12/2013	9:55:55 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	9:55:55 AM	Tube furnace set to 0
2/12/2013	9:55:56 AM	Run finished at 9:55 AM
2/12/2013	9:55:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	10:00:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	10:00:33 AM	Recipe started at 10:00 AM
2/12/2013	10:00:33 AM	Helium valve closed
2/12/2013	10:00:33 AM	H2 valve closed
2/12/2013	10:00:33 AM	BCl3 valve closed
2/12/2013	10:00:33 AM	PH3 valve closed
2/12/2013	10:00:33 AM	SiCl4 pre valve closed
2/12/2013	10:00:33 AM	SiCl4 post valve closed
2/12/2013	10:00:33 AM	Main Vac valve closed
2/12/2013	10:00:33 AM	Bubbler valve closed
2/12/2013	10:00:33 AM	Bypass valve opened
2/12/2013	10:00:33 AM	Helium MFC set to  0.000000
2/12/2013	10:00:33 AM	H2 MFC set to  0.000000
2/12/2013	10:00:33 AM	BCl3 MFC set to  0.000000
2/12/2013	10:00:33 AM	PH3 MFC set to  0.000000
2/12/2013	10:00:33 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:00:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:00:33 AM	Tube furnace set to 0
2/12/2013	10:01:50 AM	Helium valve closed
2/12/2013	10:01:50 AM	H2 valve closed
2/12/2013	10:01:50 AM	BCl3 valve closed
2/12/2013	10:01:50 AM	PH3 valve closed
2/12/2013	10:01:50 AM	SiCl4 pre valve closed
2/12/2013	10:01:50 AM	SiCl4 post valve closed
2/12/2013	10:01:50 AM	Main Vac valve closed
2/12/2013	10:01:50 AM	Bubbler valve closed
2/12/2013	10:01:50 AM	Bypass valve opened
2/12/2013	10:01:50 AM	Helium MFC set to  0.000000
2/12/2013	10:01:50 AM	H2 MFC set to  0.000000
2/12/2013	10:01:50 AM	BCl3 MFC set to  0.000000
2/12/2013	10:01:50 AM	PH3 MFC set to  0.000000
2/12/2013	10:01:50 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:01:50 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:01:50 AM	Tube furnace set to 0
2/12/2013	10:02:50 AM	Helium valve closed
2/12/2013	10:02:50 AM	H2 valve closed
2/12/2013	10:02:50 AM	BCl3 valve closed
2/12/2013	10:02:50 AM	PH3 valve closed
2/12/2013	10:02:50 AM	SiCl4 pre valve closed
2/12/2013	10:02:50 AM	SiCl4 post valve closed
2/12/2013	10:02:50 AM	Bypass valve closed
2/12/2013	10:02:50 AM	Bubbler valve closed
2/12/2013	10:02:50 AM	Main Vac valve opened
2/12/2013	10:02:50 AM	Helium MFC set to  0.000000
2/12/2013	10:02:50 AM	H2 MFC set to  0.000000
2/12/2013	10:02:50 AM	BCl3 MFC set to  0.000000
2/12/2013	10:02:50 AM	PH3 MFC set to  0.000000
2/12/2013	10:02:50 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:02:50 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:02:50 AM	Tube furnace set to 0
2/12/2013	10:02:51 AM	Run finished at 10:02 AM
2/12/2013	10:02:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	10:02:57 AM	Tube furnace set to 200
2/12/2013	10:16:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	10:16:11 AM	Recipe started at 10:16 AM
2/12/2013	10:16:11 AM	Helium valve closed
2/12/2013	10:16:11 AM	H2 valve closed
2/12/2013	10:16:11 AM	BCl3 valve closed
2/12/2013	10:16:11 AM	PH3 valve closed
2/12/2013	10:16:11 AM	SiCl4 pre valve closed
2/12/2013	10:16:11 AM	SiCl4 post valve closed
2/12/2013	10:16:11 AM	Main Vac valve closed
2/12/2013	10:16:11 AM	Bubbler valve closed
2/12/2013	10:16:11 AM	Bypass valve opened
2/12/2013	10:16:11 AM	Helium MFC set to  0.000000
2/12/2013	10:16:12 AM	H2 MFC set to  0.000000
2/12/2013	10:16:12 AM	BCl3 MFC set to  0.000000
2/12/2013	10:16:12 AM	PH3 MFC set to  0.000000
2/12/2013	10:16:12 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:16:12 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:16:12 AM	Tube furnace set to 0
2/12/2013	10:16:12 AM	Helium valve closed
2/12/2013	10:16:12 AM	H2 valve closed
2/12/2013	10:16:12 AM	BCl3 valve closed
2/12/2013	10:16:12 AM	PH3 valve closed
2/12/2013	10:16:12 AM	SiCl4 pre valve closed
2/12/2013	10:16:12 AM	SiCl4 post valve closed
2/12/2013	10:16:12 AM	Main Vac valve closed
2/12/2013	10:16:12 AM	Bubbler valve closed
2/12/2013	10:16:12 AM	Bypass valve opened
2/12/2013	10:16:12 AM	Helium MFC set to  0.000000
2/12/2013	10:16:12 AM	H2 MFC set to  0.000000
2/12/2013	10:16:12 AM	BCl3 MFC set to  0.000000
2/12/2013	10:16:12 AM	PH3 MFC set to  0.000000
2/12/2013	10:16:12 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:16:12 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:16:12 AM	Tube furnace set to 0
2/12/2013	10:16:42 AM	Helium valve closed
2/12/2013	10:16:42 AM	H2 valve closed
2/12/2013	10:16:42 AM	BCl3 valve closed
2/12/2013	10:16:42 AM	PH3 valve closed
2/12/2013	10:16:42 AM	SiCl4 pre valve closed
2/12/2013	10:16:42 AM	SiCl4 post valve closed
2/12/2013	10:16:42 AM	Bypass valve closed
2/12/2013	10:16:42 AM	Bubbler valve closed
2/12/2013	10:16:42 AM	Main Vac valve opened
2/12/2013	10:16:42 AM	Helium MFC set to  0.000000
2/12/2013	10:16:42 AM	H2 MFC set to  0.000000
2/12/2013	10:16:42 AM	BCl3 MFC set to  0.000000
2/12/2013	10:16:42 AM	PH3 MFC set to  0.000000
2/12/2013	10:16:42 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:16:42 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:16:42 AM	Tube furnace set to 0
2/12/2013	10:17:12 AM	H2 valve closed
2/12/2013	10:17:12 AM	BCl3 valve closed
2/12/2013	10:17:12 AM	PH3 valve closed
2/12/2013	10:17:12 AM	SiCl4 pre valve closed
2/12/2013	10:17:12 AM	SiCl4 post valve closed
2/12/2013	10:17:12 AM	Bypass valve closed
2/12/2013	10:17:12 AM	Bubbler valve closed
2/12/2013	10:17:12 AM	Helium valve opened
2/12/2013	10:17:13 AM	Main Vac valve opened
2/12/2013	10:17:13 AM	Helium MFC set to  20.000000
2/12/2013	10:17:13 AM	H2 MFC set to  0.000000
2/12/2013	10:17:13 AM	BCl3 MFC set to  0.000000
2/12/2013	10:17:13 AM	PH3 MFC set to  0.000000
2/12/2013	10:17:13 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:17:13 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:17:13 AM	Tube furnace set to 0
2/12/2013	10:17:43 AM	Helium valve closed
2/12/2013	10:17:43 AM	H2 valve closed
2/12/2013	10:17:43 AM	BCl3 valve closed
2/12/2013	10:17:43 AM	PH3 valve closed
2/12/2013	10:17:43 AM	SiCl4 pre valve closed
2/12/2013	10:17:43 AM	SiCl4 post valve closed
2/12/2013	10:17:43 AM	Bypass valve closed
2/12/2013	10:17:43 AM	Bubbler valve closed
2/12/2013	10:17:43 AM	Main Vac valve opened
2/12/2013	10:17:43 AM	Helium MFC set to  0.000000
2/12/2013	10:17:43 AM	H2 MFC set to  0.000000
2/12/2013	10:17:43 AM	BCl3 MFC set to  0.000000
2/12/2013	10:17:43 AM	PH3 MFC set to  0.000000
2/12/2013	10:17:43 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:17:43 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:17:43 AM	Tube furnace set to 0
2/12/2013	10:18:13 AM	H2 valve closed
2/12/2013	10:18:13 AM	BCl3 valve closed
2/12/2013	10:18:13 AM	PH3 valve closed
2/12/2013	10:18:13 AM	SiCl4 pre valve closed
2/12/2013	10:18:13 AM	SiCl4 post valve closed
2/12/2013	10:18:13 AM	Bypass valve closed
2/12/2013	10:18:13 AM	Bubbler valve closed
2/12/2013	10:18:13 AM	Helium valve opened
2/12/2013	10:18:13 AM	Main Vac valve opened
2/12/2013	10:18:13 AM	Helium MFC set to  20.000000
2/12/2013	10:18:13 AM	H2 MFC set to  0.000000
2/12/2013	10:18:13 AM	BCl3 MFC set to  0.000000
2/12/2013	10:18:13 AM	PH3 MFC set to  0.000000
2/12/2013	10:18:13 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:18:13 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:18:13 AM	Tube furnace set to 0
2/12/2013	10:18:43 AM	Helium valve closed
2/12/2013	10:18:43 AM	H2 valve closed
2/12/2013	10:18:43 AM	BCl3 valve closed
2/12/2013	10:18:43 AM	PH3 valve closed
2/12/2013	10:18:43 AM	SiCl4 pre valve closed
2/12/2013	10:18:43 AM	SiCl4 post valve closed
2/12/2013	10:18:43 AM	Bypass valve closed
2/12/2013	10:18:43 AM	Bubbler valve closed
2/12/2013	10:18:43 AM	Main Vac valve opened
2/12/2013	10:18:43 AM	Helium MFC set to  0.000000
2/12/2013	10:18:43 AM	H2 MFC set to  0.000000
2/12/2013	10:18:43 AM	BCl3 MFC set to  0.000000
2/12/2013	10:18:43 AM	PH3 MFC set to  0.000000
2/12/2013	10:18:43 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:18:43 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:18:43 AM	Tube furnace set to 0
2/12/2013	10:19:13 AM	H2 valve closed
2/12/2013	10:19:13 AM	BCl3 valve closed
2/12/2013	10:19:13 AM	PH3 valve closed
2/12/2013	10:19:13 AM	SiCl4 pre valve closed
2/12/2013	10:19:13 AM	SiCl4 post valve closed
2/12/2013	10:19:13 AM	Bypass valve closed
2/12/2013	10:19:13 AM	Bubbler valve closed
2/12/2013	10:19:13 AM	Helium valve opened
2/12/2013	10:19:13 AM	Main Vac valve opened
2/12/2013	10:19:13 AM	Helium MFC set to  20.000000
2/12/2013	10:19:13 AM	H2 MFC set to  0.000000
2/12/2013	10:19:13 AM	BCl3 MFC set to  0.000000
2/12/2013	10:19:13 AM	PH3 MFC set to  0.000000
2/12/2013	10:19:14 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:19:14 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:19:14 AM	Tube furnace set to 0
2/12/2013	10:19:44 AM	Helium valve closed
2/12/2013	10:19:44 AM	H2 valve closed
2/12/2013	10:19:44 AM	BCl3 valve closed
2/12/2013	10:19:44 AM	PH3 valve closed
2/12/2013	10:19:44 AM	SiCl4 pre valve closed
2/12/2013	10:19:44 AM	SiCl4 post valve closed
2/12/2013	10:19:44 AM	Bypass valve closed
2/12/2013	10:19:44 AM	Bubbler valve closed
2/12/2013	10:19:44 AM	Main Vac valve opened
2/12/2013	10:19:44 AM	Helium MFC set to  0.000000
2/12/2013	10:19:44 AM	H2 MFC set to  0.000000
2/12/2013	10:19:44 AM	BCl3 MFC set to  0.000000
2/12/2013	10:19:44 AM	PH3 MFC set to  0.000000
2/12/2013	10:19:44 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:19:44 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:19:44 AM	Tube furnace set to 0
2/12/2013	10:20:14 AM	H2 valve closed
2/12/2013	10:20:14 AM	BCl3 valve closed
2/12/2013	10:20:14 AM	PH3 valve closed
2/12/2013	10:20:14 AM	SiCl4 pre valve closed
2/12/2013	10:20:14 AM	SiCl4 post valve closed
2/12/2013	10:20:14 AM	Bypass valve closed
2/12/2013	10:20:14 AM	Bubbler valve closed
2/12/2013	10:20:14 AM	Helium valve opened
2/12/2013	10:20:14 AM	Main Vac valve opened
2/12/2013	10:20:14 AM	Helium MFC set to  20.000000
2/12/2013	10:20:14 AM	H2 MFC set to  0.000000
2/12/2013	10:20:14 AM	BCl3 MFC set to  0.000000
2/12/2013	10:20:14 AM	PH3 MFC set to  0.000000
2/12/2013	10:20:14 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:20:14 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:20:14 AM	Tube furnace set to 0
2/12/2013	10:20:44 AM	Helium valve closed
2/12/2013	10:20:44 AM	H2 valve closed
2/12/2013	10:20:44 AM	BCl3 valve closed
2/12/2013	10:20:44 AM	PH3 valve closed
2/12/2013	10:20:44 AM	SiCl4 pre valve closed
2/12/2013	10:20:44 AM	SiCl4 post valve closed
2/12/2013	10:20:44 AM	Bypass valve closed
2/12/2013	10:20:44 AM	Bubbler valve closed
2/12/2013	10:20:44 AM	Main Vac valve opened
2/12/2013	10:20:44 AM	Helium MFC set to  0.000000
2/12/2013	10:20:44 AM	H2 MFC set to  0.000000
2/12/2013	10:20:44 AM	BCl3 MFC set to  0.000000
2/12/2013	10:20:44 AM	PH3 MFC set to  0.000000
2/12/2013	10:20:44 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:20:44 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:20:44 AM	Tube furnace set to 0
2/12/2013	10:21:14 AM	H2 valve closed
2/12/2013	10:21:14 AM	BCl3 valve closed
2/12/2013	10:21:14 AM	PH3 valve closed
2/12/2013	10:21:14 AM	SiCl4 pre valve closed
2/12/2013	10:21:14 AM	SiCl4 post valve closed
2/12/2013	10:21:14 AM	Bypass valve closed
2/12/2013	10:21:14 AM	Bubbler valve closed
2/12/2013	10:21:14 AM	Helium valve opened
2/12/2013	10:21:14 AM	Main Vac valve opened
2/12/2013	10:21:14 AM	Helium MFC set to  20.000000
2/12/2013	10:21:14 AM	H2 MFC set to  0.000000
2/12/2013	10:21:14 AM	BCl3 MFC set to  0.000000
2/12/2013	10:21:14 AM	PH3 MFC set to  0.000000
2/12/2013	10:21:14 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:21:14 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:21:15 AM	Tube furnace set to 0
2/12/2013	10:21:45 AM	Helium valve closed
2/12/2013	10:21:45 AM	H2 valve closed
2/12/2013	10:21:45 AM	BCl3 valve closed
2/12/2013	10:21:45 AM	PH3 valve closed
2/12/2013	10:21:45 AM	SiCl4 pre valve closed
2/12/2013	10:21:45 AM	SiCl4 post valve closed
2/12/2013	10:21:45 AM	Bypass valve closed
2/12/2013	10:21:45 AM	Bubbler valve closed
2/12/2013	10:21:45 AM	Main Vac valve opened
2/12/2013	10:21:45 AM	Helium MFC set to  0.000000
2/12/2013	10:21:45 AM	H2 MFC set to  0.000000
2/12/2013	10:21:45 AM	BCl3 MFC set to  0.000000
2/12/2013	10:21:45 AM	PH3 MFC set to  0.000000
2/12/2013	10:21:45 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:21:45 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:21:45 AM	Tube furnace set to 0
2/12/2013	10:22:15 AM	H2 valve closed
2/12/2013	10:22:15 AM	BCl3 valve closed
2/12/2013	10:22:15 AM	PH3 valve closed
2/12/2013	10:22:15 AM	SiCl4 pre valve closed
2/12/2013	10:22:15 AM	SiCl4 post valve closed
2/12/2013	10:22:15 AM	Bypass valve closed
2/12/2013	10:22:15 AM	Bubbler valve closed
2/12/2013	10:22:15 AM	Helium valve opened
2/12/2013	10:22:15 AM	Main Vac valve opened
2/12/2013	10:22:15 AM	Helium MFC set to  20.000000
2/12/2013	10:22:15 AM	H2 MFC set to  0.000000
2/12/2013	10:22:15 AM	BCl3 MFC set to  0.000000
2/12/2013	10:22:15 AM	PH3 MFC set to  0.000000
2/12/2013	10:22:15 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:22:15 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:22:15 AM	Tube furnace set to 0
2/12/2013	10:22:45 AM	Helium valve closed
2/12/2013	10:22:45 AM	H2 valve closed
2/12/2013	10:22:45 AM	BCl3 valve closed
2/12/2013	10:22:45 AM	PH3 valve closed
2/12/2013	10:22:45 AM	SiCl4 pre valve closed
2/12/2013	10:22:45 AM	SiCl4 post valve closed
2/12/2013	10:22:45 AM	Bypass valve closed
2/12/2013	10:22:45 AM	Bubbler valve closed
2/12/2013	10:22:45 AM	Main Vac valve opened
2/12/2013	10:22:45 AM	Helium MFC set to  0.000000
2/12/2013	10:22:45 AM	H2 MFC set to  0.000000
2/12/2013	10:22:45 AM	BCl3 MFC set to  0.000000
2/12/2013	10:22:45 AM	PH3 MFC set to  0.000000
2/12/2013	10:22:45 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:22:45 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:22:45 AM	Tube furnace set to 0
2/12/2013	10:23:15 AM	H2 valve closed
2/12/2013	10:23:15 AM	BCl3 valve closed
2/12/2013	10:23:15 AM	PH3 valve closed
2/12/2013	10:23:15 AM	SiCl4 pre valve closed
2/12/2013	10:23:15 AM	SiCl4 post valve closed
2/12/2013	10:23:15 AM	Bypass valve closed
2/12/2013	10:23:15 AM	Bubbler valve closed
2/12/2013	10:23:15 AM	Helium valve opened
2/12/2013	10:23:15 AM	Main Vac valve opened
2/12/2013	10:23:15 AM	Helium MFC set to  20.000000
2/12/2013	10:23:15 AM	H2 MFC set to  0.000000
2/12/2013	10:23:15 AM	BCl3 MFC set to  0.000000
2/12/2013	10:23:15 AM	PH3 MFC set to  0.000000
2/12/2013	10:23:15 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:23:15 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:23:16 AM	Tube furnace set to 0
2/12/2013	10:23:46 AM	Helium valve closed
2/12/2013	10:23:46 AM	H2 valve closed
2/12/2013	10:23:46 AM	BCl3 valve closed
2/12/2013	10:23:46 AM	PH3 valve closed
2/12/2013	10:23:46 AM	SiCl4 pre valve closed
2/12/2013	10:23:46 AM	SiCl4 post valve closed
2/12/2013	10:23:46 AM	Bypass valve closed
2/12/2013	10:23:46 AM	Bubbler valve closed
2/12/2013	10:23:46 AM	Main Vac valve opened
2/12/2013	10:23:46 AM	Helium MFC set to  0.000000
2/12/2013	10:23:46 AM	H2 MFC set to  0.000000
2/12/2013	10:23:46 AM	BCl3 MFC set to  0.000000
2/12/2013	10:23:46 AM	PH3 MFC set to  0.000000
2/12/2013	10:23:46 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:23:46 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:23:46 AM	Tube furnace set to 0
2/12/2013	10:24:16 AM	H2 valve closed
2/12/2013	10:24:16 AM	BCl3 valve closed
2/12/2013	10:24:16 AM	PH3 valve closed
2/12/2013	10:24:16 AM	SiCl4 pre valve closed
2/12/2013	10:24:16 AM	SiCl4 post valve closed
2/12/2013	10:24:16 AM	Bypass valve closed
2/12/2013	10:24:16 AM	Bubbler valve closed
2/12/2013	10:24:16 AM	Helium valve opened
2/12/2013	10:24:16 AM	Main Vac valve opened
2/12/2013	10:24:16 AM	Helium MFC set to  20.000000
2/12/2013	10:24:16 AM	H2 MFC set to  0.000000
2/12/2013	10:24:16 AM	BCl3 MFC set to  0.000000
2/12/2013	10:24:16 AM	PH3 MFC set to  0.000000
2/12/2013	10:24:16 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:24:16 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:24:16 AM	Tube furnace set to 0
2/12/2013	10:24:46 AM	Helium valve closed
2/12/2013	10:24:46 AM	H2 valve closed
2/12/2013	10:24:46 AM	BCl3 valve closed
2/12/2013	10:24:46 AM	PH3 valve closed
2/12/2013	10:24:46 AM	SiCl4 pre valve closed
2/12/2013	10:24:46 AM	SiCl4 post valve closed
2/12/2013	10:24:46 AM	Bypass valve closed
2/12/2013	10:24:46 AM	Bubbler valve closed
2/12/2013	10:24:46 AM	Main Vac valve opened
2/12/2013	10:24:46 AM	Helium MFC set to  0.000000
2/12/2013	10:24:46 AM	H2 MFC set to  0.000000
2/12/2013	10:24:46 AM	BCl3 MFC set to  0.000000
2/12/2013	10:24:46 AM	PH3 MFC set to  0.000000
2/12/2013	10:24:46 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:24:46 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:24:46 AM	Tube furnace set to 0
2/12/2013	10:25:16 AM	H2 valve closed
2/12/2013	10:25:16 AM	BCl3 valve closed
2/12/2013	10:25:16 AM	PH3 valve closed
2/12/2013	10:25:16 AM	SiCl4 pre valve closed
2/12/2013	10:25:16 AM	SiCl4 post valve closed
2/12/2013	10:25:16 AM	Bypass valve closed
2/12/2013	10:25:16 AM	Bubbler valve closed
2/12/2013	10:25:16 AM	Helium valve opened
2/12/2013	10:25:16 AM	Main Vac valve opened
2/12/2013	10:25:16 AM	Helium MFC set to  20.000000
2/12/2013	10:25:16 AM	H2 MFC set to  0.000000
2/12/2013	10:25:16 AM	BCl3 MFC set to  0.000000
2/12/2013	10:25:16 AM	PH3 MFC set to  0.000000
2/12/2013	10:25:16 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:25:16 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:25:17 AM	Tube furnace set to 0
2/12/2013	10:25:47 AM	Helium valve closed
2/12/2013	10:25:47 AM	H2 valve closed
2/12/2013	10:25:47 AM	BCl3 valve closed
2/12/2013	10:25:47 AM	PH3 valve closed
2/12/2013	10:25:47 AM	SiCl4 pre valve closed
2/12/2013	10:25:47 AM	SiCl4 post valve closed
2/12/2013	10:25:47 AM	Bypass valve closed
2/12/2013	10:25:47 AM	Bubbler valve closed
2/12/2013	10:25:47 AM	Main Vac valve opened
2/12/2013	10:25:47 AM	Helium MFC set to  0.000000
2/12/2013	10:25:47 AM	H2 MFC set to  0.000000
2/12/2013	10:25:47 AM	BCl3 MFC set to  0.000000
2/12/2013	10:25:47 AM	PH3 MFC set to  0.000000
2/12/2013	10:25:47 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:25:47 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:25:47 AM	Tube furnace set to 0
2/12/2013	10:26:17 AM	H2 valve closed
2/12/2013	10:26:17 AM	BCl3 valve closed
2/12/2013	10:26:17 AM	PH3 valve closed
2/12/2013	10:26:17 AM	SiCl4 pre valve closed
2/12/2013	10:26:17 AM	SiCl4 post valve closed
2/12/2013	10:26:17 AM	Bypass valve closed
2/12/2013	10:26:17 AM	Bubbler valve closed
2/12/2013	10:26:17 AM	Helium valve opened
2/12/2013	10:26:17 AM	Main Vac valve opened
2/12/2013	10:26:17 AM	Helium MFC set to  20.000000
2/12/2013	10:26:17 AM	H2 MFC set to  0.000000
2/12/2013	10:26:17 AM	BCl3 MFC set to  0.000000
2/12/2013	10:26:17 AM	PH3 MFC set to  0.000000
2/12/2013	10:26:17 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:26:17 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:26:17 AM	Tube furnace set to 0
2/12/2013	10:26:47 AM	Helium valve closed
2/12/2013	10:26:47 AM	H2 valve closed
2/12/2013	10:26:47 AM	BCl3 valve closed
2/12/2013	10:26:47 AM	PH3 valve closed
2/12/2013	10:26:47 AM	SiCl4 pre valve closed
2/12/2013	10:26:47 AM	SiCl4 post valve closed
2/12/2013	10:26:47 AM	Bypass valve closed
2/12/2013	10:26:47 AM	Bubbler valve closed
2/12/2013	10:26:47 AM	Main Vac valve opened
2/12/2013	10:26:47 AM	Helium MFC set to  0.000000
2/12/2013	10:26:47 AM	H2 MFC set to  0.000000
2/12/2013	10:26:47 AM	BCl3 MFC set to  0.000000
2/12/2013	10:26:47 AM	PH3 MFC set to  0.000000
2/12/2013	10:26:47 AM	SiCl4 MFC set to  0.000000
2/12/2013	10:26:47 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	10:26:47 AM	Tube furnace set to 0
2/12/2013	10:26:48 AM	Run finished at 10:26 AM
2/12/2013	10:26:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	10:50:13 AM	Main Vac valve closed
2/12/2013	10:50:30 AM	Main Vac valve opened
2/12/2013	11:09:21 AM	Recipe started at 11:09 AM
2/12/2013	11:09:21 AM	Helium valve closed
2/12/2013	11:09:21 AM	H2 valve closed
2/12/2013	11:09:21 AM	BCl3 valve closed
2/12/2013	11:09:21 AM	SiCl4 pre valve closed
2/12/2013	11:09:21 AM	SiCl4 post valve closed
2/12/2013	11:09:21 AM	Main Vac valve closed
2/12/2013	11:09:21 AM	Bypass valve closed
2/12/2013	11:09:21 AM	Bubbler valve closed
2/12/2013	11:09:21 AM	PH3 valve opened
2/12/2013	11:09:21 AM	Helium MFC set to  0.000000
2/12/2013	11:09:21 AM	H2 MFC set to  0.000000
2/12/2013	11:09:21 AM	BCl3 MFC set to  0.000000
2/12/2013	11:09:21 AM	PH3 MFC set to  0.000000
2/12/2013	11:09:21 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:09:21 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:09:21 AM	Tube furnace set to 0
2/12/2013	11:09:24 AM	Helium valve closed
2/12/2013	11:09:24 AM	BCl3 valve closed
2/12/2013	11:09:24 AM	PH3 valve closed
2/12/2013	11:09:24 AM	SiCl4 pre valve closed
2/12/2013	11:09:24 AM	SiCl4 post valve closed
2/12/2013	11:09:24 AM	Main Vac valve closed
2/12/2013	11:09:24 AM	Bypass valve closed
2/12/2013	11:09:24 AM	Bubbler valve closed
2/12/2013	11:09:24 AM	H2 valve opened
2/12/2013	11:09:24 AM	Helium MFC set to  0.000000
2/12/2013	11:09:24 AM	H2 MFC set to  500.000000
2/12/2013	11:09:24 AM	BCl3 MFC set to  0.000000
2/12/2013	11:09:24 AM	PH3 MFC set to  0.000000
2/12/2013	11:09:24 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:09:24 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:09:25 AM	Tube furnace set to 0
2/12/2013	11:10:37 AM	Helium valve closed
2/12/2013	11:10:37 AM	BCl3 valve closed
2/12/2013	11:10:37 AM	PH3 valve closed
2/12/2013	11:10:37 AM	SiCl4 pre valve closed
2/12/2013	11:10:37 AM	SiCl4 post valve closed
2/12/2013	11:10:37 AM	Main Vac valve closed
2/12/2013	11:10:37 AM	Bypass valve closed
2/12/2013	11:10:37 AM	H2 valve opened
2/12/2013	11:10:37 AM	Bubbler valve opened
2/12/2013	11:10:37 AM	Helium MFC set to  0.000000
2/12/2013	11:10:37 AM	H2 MFC set to  500.000000
2/12/2013	11:10:37 AM	BCl3 MFC set to  0.000000
2/12/2013	11:10:37 AM	PH3 MFC set to  0.000000
2/12/2013	11:10:37 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:10:37 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:10:37 AM	Tube furnace set to 0
2/12/2013	11:10:38 AM	Helium valve closed
2/12/2013	11:10:38 AM	BCl3 valve closed
2/12/2013	11:10:38 AM	PH3 valve closed
2/12/2013	11:10:38 AM	SiCl4 pre valve closed
2/12/2013	11:10:38 AM	SiCl4 post valve closed
2/12/2013	11:10:38 AM	Main Vac valve closed
2/12/2013	11:10:38 AM	Bypass valve closed
2/12/2013	11:10:38 AM	H2 valve opened
2/12/2013	11:10:38 AM	Bubbler valve opened
2/12/2013	11:10:38 AM	Helium MFC set to  0.000000
2/12/2013	11:10:38 AM	H2 MFC set to  500.000000
2/12/2013	11:10:38 AM	BCl3 MFC set to  0.000000
2/12/2013	11:10:38 AM	PH3 MFC set to  0.000000
2/12/2013	11:10:38 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:10:38 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:10:39 AM	Tube furnace set to 1000
2/12/2013	11:30:39 AM	Helium valve closed
2/12/2013	11:30:39 AM	PH3 valve closed
2/12/2013	11:30:39 AM	Main Vac valve closed
2/12/2013	11:30:39 AM	Bypass valve closed
2/12/2013	11:30:39 AM	H2 valve opened
2/12/2013	11:30:39 AM	BCl3 valve opened
2/12/2013	11:30:39 AM	SiCl4 pre valve opened
2/12/2013	11:30:39 AM	SiCl4 post valve opened
2/12/2013	11:30:39 AM	Bubbler valve opened
2/12/2013	11:30:39 AM	Helium MFC set to  0.000000
2/12/2013	11:30:39 AM	H2 MFC set to  450.000000
2/12/2013	11:30:39 AM	BCl3 MFC set to  1.300000
2/12/2013	11:30:39 AM	PH3 MFC set to  0.000000
2/12/2013	11:30:39 AM	SiCl4 MFC set to  50.000000
2/12/2013	11:30:39 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:30:39 AM	Tube furnace set to 1000
2/12/2013	11:40:39 AM	Helium valve closed
2/12/2013	11:40:39 AM	BCl3 valve closed
2/12/2013	11:40:39 AM	PH3 valve closed
2/12/2013	11:40:39 AM	SiCl4 pre valve closed
2/12/2013	11:40:39 AM	SiCl4 post valve closed
2/12/2013	11:40:39 AM	Main Vac valve closed
2/12/2013	11:40:39 AM	Bypass valve closed
2/12/2013	11:40:39 AM	H2 valve opened
2/12/2013	11:40:39 AM	Bubbler valve opened
2/12/2013	11:40:39 AM	Helium MFC set to  0.000000
2/12/2013	11:40:39 AM	H2 MFC set to  500.000000
2/12/2013	11:40:39 AM	BCl3 MFC set to  0.000000
2/12/2013	11:40:39 AM	PH3 MFC set to  0.000000
2/12/2013	11:40:39 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:40:39 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:40:39 AM	Tube furnace set to 900
2/12/2013	11:45:39 AM	Helium valve closed
2/12/2013	11:45:39 AM	BCl3 valve closed
2/12/2013	11:45:39 AM	PH3 valve closed
2/12/2013	11:45:39 AM	SiCl4 pre valve closed
2/12/2013	11:45:39 AM	SiCl4 post valve closed
2/12/2013	11:45:39 AM	Main Vac valve closed
2/12/2013	11:45:39 AM	Bypass valve closed
2/12/2013	11:45:39 AM	H2 valve opened
2/12/2013	11:45:39 AM	Bubbler valve opened
2/12/2013	11:45:39 AM	Helium MFC set to  0.000000
2/12/2013	11:45:39 AM	H2 MFC set to  500.000000
2/12/2013	11:45:39 AM	BCl3 MFC set to  0.000000
2/12/2013	11:45:39 AM	PH3 MFC set to  0.000000
2/12/2013	11:45:39 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:45:39 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:45:39 AM	Tube furnace set to 800
2/12/2013	11:50:39 AM	Helium valve closed
2/12/2013	11:50:39 AM	BCl3 valve closed
2/12/2013	11:50:39 AM	PH3 valve closed
2/12/2013	11:50:39 AM	SiCl4 pre valve closed
2/12/2013	11:50:39 AM	SiCl4 post valve closed
2/12/2013	11:50:39 AM	Main Vac valve closed
2/12/2013	11:50:39 AM	Bypass valve closed
2/12/2013	11:50:39 AM	H2 valve opened
2/12/2013	11:50:39 AM	Bubbler valve opened
2/12/2013	11:50:39 AM	Helium MFC set to  0.000000
2/12/2013	11:50:39 AM	H2 MFC set to  500.000000
2/12/2013	11:50:39 AM	BCl3 MFC set to  0.000000
2/12/2013	11:50:39 AM	PH3 MFC set to  0.000000
2/12/2013	11:50:39 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:50:39 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:50:39 AM	Tube furnace set to 700
2/12/2013	11:55:39 AM	Helium valve closed
2/12/2013	11:55:39 AM	BCl3 valve closed
2/12/2013	11:55:39 AM	PH3 valve closed
2/12/2013	11:55:39 AM	SiCl4 pre valve closed
2/12/2013	11:55:39 AM	SiCl4 post valve closed
2/12/2013	11:55:39 AM	Main Vac valve closed
2/12/2013	11:55:39 AM	Bypass valve closed
2/12/2013	11:55:39 AM	H2 valve opened
2/12/2013	11:55:39 AM	Bubbler valve opened
2/12/2013	11:55:40 AM	Helium MFC set to  0.000000
2/12/2013	11:55:40 AM	H2 MFC set to  500.000000
2/12/2013	11:55:40 AM	BCl3 MFC set to  0.000000
2/12/2013	11:55:40 AM	PH3 MFC set to  0.000000
2/12/2013	11:55:40 AM	SiCl4 MFC set to  0.000000
2/12/2013	11:55:40 AM	Bypass solenoid MFC set to  0.000000
2/12/2013	11:55:40 AM	Tube furnace set to 600
2/12/2013	12:00:40 PM	H2 valve closed
2/12/2013	12:00:40 PM	BCl3 valve closed
2/12/2013	12:00:40 PM	PH3 valve closed
2/12/2013	12:00:40 PM	SiCl4 pre valve closed
2/12/2013	12:00:40 PM	SiCl4 post valve closed
2/12/2013	12:00:40 PM	Main Vac valve closed
2/12/2013	12:00:40 PM	Bypass valve closed
2/12/2013	12:00:40 PM	Helium valve opened
2/12/2013	12:00:40 PM	Bubbler valve opened
2/12/2013	12:00:40 PM	Helium MFC set to  500.000000
2/12/2013	12:00:40 PM	H2 MFC set to  0.000000
2/12/2013	12:00:40 PM	BCl3 MFC set to  0.000000
2/12/2013	12:00:40 PM	PH3 MFC set to  0.000000
2/12/2013	12:00:40 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:00:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:00:40 PM	Tube furnace set to 0
2/12/2013	12:20:40 PM	Helium valve closed
2/12/2013	12:20:40 PM	H2 valve closed
2/12/2013	12:20:40 PM	BCl3 valve closed
2/12/2013	12:20:40 PM	PH3 valve closed
2/12/2013	12:20:40 PM	SiCl4 pre valve closed
2/12/2013	12:20:40 PM	SiCl4 post valve closed
2/12/2013	12:20:40 PM	Main Vac valve closed
2/12/2013	12:20:40 PM	Bypass valve closed
2/12/2013	12:20:40 PM	Bubbler valve closed
2/12/2013	12:20:40 PM	Helium MFC set to  0.000000
2/12/2013	12:20:40 PM	H2 MFC set to  0.000000
2/12/2013	12:20:40 PM	BCl3 MFC set to  0.000000
2/12/2013	12:20:40 PM	PH3 MFC set to  0.000000
2/12/2013	12:20:40 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:20:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:20:40 PM	Tube furnace set to 0
2/12/2013	12:20:41 PM	Run finished at 12:20 PM
2/12/2013	12:41:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	12:41:43 PM	Recipe started at 12:41 PM
2/12/2013	12:41:43 PM	Helium valve closed
2/12/2013	12:41:43 PM	H2 valve closed
2/12/2013	12:41:43 PM	BCl3 valve closed
2/12/2013	12:41:43 PM	PH3 valve closed
2/12/2013	12:41:43 PM	SiCl4 pre valve closed
2/12/2013	12:41:43 PM	SiCl4 post valve closed
2/12/2013	12:41:43 PM	Main Vac valve closed
2/12/2013	12:41:43 PM	Bypass valve closed
2/12/2013	12:41:43 PM	Bubbler valve closed
2/12/2013	12:41:43 PM	Helium MFC set to  0.000000
2/12/2013	12:41:43 PM	H2 MFC set to  0.000000
2/12/2013	12:41:43 PM	BCl3 MFC set to  0.000000
2/12/2013	12:41:43 PM	PH3 MFC set to  0.000000
2/12/2013	12:41:43 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:41:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:41:43 PM	Tube furnace set to 0
2/12/2013	12:41:46 PM	H2 valve closed
2/12/2013	12:41:46 PM	BCl3 valve closed
2/12/2013	12:41:46 PM	PH3 valve closed
2/12/2013	12:41:46 PM	SiCl4 pre valve closed
2/12/2013	12:41:46 PM	SiCl4 post valve closed
2/12/2013	12:41:46 PM	Main Vac valve closed
2/12/2013	12:41:46 PM	Bypass valve closed
2/12/2013	12:41:46 PM	Bubbler valve closed
2/12/2013	12:41:46 PM	Helium valve opened
2/12/2013	12:41:46 PM	Helium MFC set to  500.000000
2/12/2013	12:41:46 PM	H2 MFC set to  0.000000
2/12/2013	12:41:46 PM	BCl3 MFC set to  0.000000
2/12/2013	12:41:46 PM	PH3 MFC set to  0.000000
2/12/2013	12:41:46 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:41:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:41:46 PM	Tube furnace set to 0
2/12/2013	12:41:50 PM	Helium valve closed
2/12/2013	12:41:50 PM	H2 valve closed
2/12/2013	12:41:50 PM	BCl3 valve closed
2/12/2013	12:41:50 PM	PH3 valve closed
2/12/2013	12:41:50 PM	SiCl4 pre valve closed
2/12/2013	12:41:50 PM	SiCl4 post valve closed
2/12/2013	12:41:50 PM	Main Vac valve closed
2/12/2013	12:41:50 PM	Bypass valve closed
2/12/2013	12:41:50 PM	Bubbler valve closed
2/12/2013	12:41:50 PM	Helium MFC set to  0.000000
2/12/2013	12:41:50 PM	H2 MFC set to  0.000000
2/12/2013	12:41:50 PM	BCl3 MFC set to  0.000000
2/12/2013	12:41:50 PM	PH3 MFC set to  0.000000
2/12/2013	12:41:50 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:41:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:41:51 PM	Tube furnace set to 0
2/12/2013	12:41:52 PM	Run finished at 12:41 PM
2/12/2013	12:41:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	12:44:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	12:44:37 PM	Recipe started at 12:44 PM
2/12/2013	12:44:37 PM	Helium valve closed
2/12/2013	12:44:37 PM	H2 valve closed
2/12/2013	12:44:37 PM	BCl3 valve closed
2/12/2013	12:44:37 PM	PH3 valve closed
2/12/2013	12:44:37 PM	SiCl4 pre valve closed
2/12/2013	12:44:37 PM	SiCl4 post valve closed
2/12/2013	12:44:37 PM	Main Vac valve closed
2/12/2013	12:44:37 PM	Bubbler valve closed
2/12/2013	12:44:37 PM	Bypass valve opened
2/12/2013	12:44:37 PM	Helium MFC set to  0.000000
2/12/2013	12:44:37 PM	H2 MFC set to  0.000000
2/12/2013	12:44:37 PM	BCl3 MFC set to  0.000000
2/12/2013	12:44:37 PM	PH3 MFC set to  0.000000
2/12/2013	12:44:37 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:44:37 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:44:37 PM	Tube furnace set to 0
2/12/2013	12:45:48 PM	Helium valve closed
2/12/2013	12:45:48 PM	H2 valve closed
2/12/2013	12:45:48 PM	BCl3 valve closed
2/12/2013	12:45:48 PM	PH3 valve closed
2/12/2013	12:45:48 PM	SiCl4 pre valve closed
2/12/2013	12:45:48 PM	SiCl4 post valve closed
2/12/2013	12:45:48 PM	Main Vac valve closed
2/12/2013	12:45:48 PM	Bubbler valve closed
2/12/2013	12:45:48 PM	Bypass valve opened
2/12/2013	12:45:48 PM	Helium MFC set to  0.000000
2/12/2013	12:45:48 PM	H2 MFC set to  0.000000
2/12/2013	12:45:48 PM	BCl3 MFC set to  0.000000
2/12/2013	12:45:48 PM	PH3 MFC set to  0.000000
2/12/2013	12:45:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:45:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:45:48 PM	Tube furnace set to 0
2/12/2013	12:46:48 PM	Helium valve closed
2/12/2013	12:46:48 PM	H2 valve closed
2/12/2013	12:46:48 PM	BCl3 valve closed
2/12/2013	12:46:48 PM	PH3 valve closed
2/12/2013	12:46:48 PM	SiCl4 pre valve closed
2/12/2013	12:46:48 PM	SiCl4 post valve closed
2/12/2013	12:46:48 PM	Bypass valve closed
2/12/2013	12:46:48 PM	Bubbler valve closed
2/12/2013	12:46:48 PM	Main Vac valve opened
2/12/2013	12:46:48 PM	Helium MFC set to  0.000000
2/12/2013	12:46:48 PM	H2 MFC set to  0.000000
2/12/2013	12:46:48 PM	BCl3 MFC set to  0.000000
2/12/2013	12:46:48 PM	PH3 MFC set to  0.000000
2/12/2013	12:46:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	12:46:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	12:46:48 PM	Tube furnace set to 0
2/12/2013	12:46:49 PM	Run finished at 12:46 PM
2/12/2013	12:46:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	12:46:55 PM	Tube furnace set to 200
2/12/2013	1:03:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	1:04:00 PM	Recipe started at 1:04 PM
2/12/2013	1:04:00 PM	Helium valve closed
2/12/2013	1:04:00 PM	H2 valve closed
2/12/2013	1:04:00 PM	BCl3 valve closed
2/12/2013	1:04:00 PM	PH3 valve closed
2/12/2013	1:04:00 PM	SiCl4 pre valve closed
2/12/2013	1:04:00 PM	SiCl4 post valve closed
2/12/2013	1:04:00 PM	Main Vac valve closed
2/12/2013	1:04:01 PM	Bubbler valve closed
2/12/2013	1:04:01 PM	Bypass valve opened
2/12/2013	1:04:01 PM	Helium MFC set to  0.000000
2/12/2013	1:04:01 PM	H2 MFC set to  0.000000
2/12/2013	1:04:01 PM	BCl3 MFC set to  0.000000
2/12/2013	1:04:01 PM	PH3 MFC set to  0.000000
2/12/2013	1:04:01 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:04:01 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:04:01 PM	Tube furnace set to 0
2/12/2013	1:04:01 PM	Helium valve closed
2/12/2013	1:04:01 PM	H2 valve closed
2/12/2013	1:04:01 PM	BCl3 valve closed
2/12/2013	1:04:01 PM	PH3 valve closed
2/12/2013	1:04:01 PM	SiCl4 pre valve closed
2/12/2013	1:04:01 PM	SiCl4 post valve closed
2/12/2013	1:04:01 PM	Main Vac valve closed
2/12/2013	1:04:01 PM	Bubbler valve closed
2/12/2013	1:04:01 PM	Bypass valve opened
2/12/2013	1:04:01 PM	Helium MFC set to  0.000000
2/12/2013	1:04:01 PM	H2 MFC set to  0.000000
2/12/2013	1:04:01 PM	BCl3 MFC set to  0.000000
2/12/2013	1:04:01 PM	PH3 MFC set to  0.000000
2/12/2013	1:04:01 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:04:01 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:04:01 PM	Tube furnace set to 0
2/12/2013	1:04:31 PM	Helium valve closed
2/12/2013	1:04:31 PM	H2 valve closed
2/12/2013	1:04:31 PM	BCl3 valve closed
2/12/2013	1:04:31 PM	PH3 valve closed
2/12/2013	1:04:31 PM	SiCl4 pre valve closed
2/12/2013	1:04:31 PM	SiCl4 post valve closed
2/12/2013	1:04:31 PM	Bypass valve closed
2/12/2013	1:04:31 PM	Bubbler valve closed
2/12/2013	1:04:31 PM	Main Vac valve opened
2/12/2013	1:04:31 PM	Helium MFC set to  0.000000
2/12/2013	1:04:31 PM	H2 MFC set to  0.000000
2/12/2013	1:04:31 PM	BCl3 MFC set to  0.000000
2/12/2013	1:04:31 PM	PH3 MFC set to  0.000000
2/12/2013	1:04:31 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:04:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:04:31 PM	Tube furnace set to 0
2/12/2013	1:05:01 PM	H2 valve closed
2/12/2013	1:05:01 PM	BCl3 valve closed
2/12/2013	1:05:01 PM	PH3 valve closed
2/12/2013	1:05:01 PM	SiCl4 pre valve closed
2/12/2013	1:05:01 PM	SiCl4 post valve closed
2/12/2013	1:05:01 PM	Bypass valve closed
2/12/2013	1:05:01 PM	Bubbler valve closed
2/12/2013	1:05:01 PM	Helium valve opened
2/12/2013	1:05:02 PM	Main Vac valve opened
2/12/2013	1:05:02 PM	Helium MFC set to  20.000000
2/12/2013	1:05:02 PM	H2 MFC set to  0.000000
2/12/2013	1:05:02 PM	BCl3 MFC set to  0.000000
2/12/2013	1:05:02 PM	PH3 MFC set to  0.000000
2/12/2013	1:05:02 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:05:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:05:02 PM	Tube furnace set to 0
2/12/2013	1:05:32 PM	Helium valve closed
2/12/2013	1:05:32 PM	H2 valve closed
2/12/2013	1:05:32 PM	BCl3 valve closed
2/12/2013	1:05:32 PM	PH3 valve closed
2/12/2013	1:05:32 PM	SiCl4 pre valve closed
2/12/2013	1:05:32 PM	SiCl4 post valve closed
2/12/2013	1:05:32 PM	Bypass valve closed
2/12/2013	1:05:32 PM	Bubbler valve closed
2/12/2013	1:05:32 PM	Main Vac valve opened
2/12/2013	1:05:32 PM	Helium MFC set to  0.000000
2/12/2013	1:05:32 PM	H2 MFC set to  0.000000
2/12/2013	1:05:32 PM	BCl3 MFC set to  0.000000
2/12/2013	1:05:32 PM	PH3 MFC set to  0.000000
2/12/2013	1:05:32 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:05:32 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:05:32 PM	Tube furnace set to 0
2/12/2013	1:06:02 PM	H2 valve closed
2/12/2013	1:06:02 PM	BCl3 valve closed
2/12/2013	1:06:02 PM	PH3 valve closed
2/12/2013	1:06:02 PM	SiCl4 pre valve closed
2/12/2013	1:06:02 PM	SiCl4 post valve closed
2/12/2013	1:06:02 PM	Bypass valve closed
2/12/2013	1:06:02 PM	Bubbler valve closed
2/12/2013	1:06:02 PM	Helium valve opened
2/12/2013	1:06:02 PM	Main Vac valve opened
2/12/2013	1:06:02 PM	Helium MFC set to  20.000000
2/12/2013	1:06:02 PM	H2 MFC set to  0.000000
2/12/2013	1:06:02 PM	BCl3 MFC set to  0.000000
2/12/2013	1:06:02 PM	PH3 MFC set to  0.000000
2/12/2013	1:06:02 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:06:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:06:02 PM	Tube furnace set to 0
2/12/2013	1:06:32 PM	Helium valve closed
2/12/2013	1:06:32 PM	H2 valve closed
2/12/2013	1:06:32 PM	BCl3 valve closed
2/12/2013	1:06:32 PM	PH3 valve closed
2/12/2013	1:06:32 PM	SiCl4 pre valve closed
2/12/2013	1:06:32 PM	SiCl4 post valve closed
2/12/2013	1:06:32 PM	Bypass valve closed
2/12/2013	1:06:32 PM	Bubbler valve closed
2/12/2013	1:06:32 PM	Main Vac valve opened
2/12/2013	1:06:32 PM	Helium MFC set to  0.000000
2/12/2013	1:06:32 PM	H2 MFC set to  0.000000
2/12/2013	1:06:32 PM	BCl3 MFC set to  0.000000
2/12/2013	1:06:32 PM	PH3 MFC set to  0.000000
2/12/2013	1:06:32 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:06:32 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:06:32 PM	Tube furnace set to 0
2/12/2013	1:07:02 PM	H2 valve closed
2/12/2013	1:07:02 PM	BCl3 valve closed
2/12/2013	1:07:02 PM	PH3 valve closed
2/12/2013	1:07:02 PM	SiCl4 pre valve closed
2/12/2013	1:07:02 PM	SiCl4 post valve closed
2/12/2013	1:07:02 PM	Bypass valve closed
2/12/2013	1:07:02 PM	Bubbler valve closed
2/12/2013	1:07:02 PM	Helium valve opened
2/12/2013	1:07:02 PM	Main Vac valve opened
2/12/2013	1:07:02 PM	Helium MFC set to  20.000000
2/12/2013	1:07:02 PM	H2 MFC set to  0.000000
2/12/2013	1:07:02 PM	BCl3 MFC set to  0.000000
2/12/2013	1:07:03 PM	PH3 MFC set to  0.000000
2/12/2013	1:07:03 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:07:03 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:07:03 PM	Tube furnace set to 0
2/12/2013	1:07:33 PM	Helium valve closed
2/12/2013	1:07:33 PM	H2 valve closed
2/12/2013	1:07:33 PM	BCl3 valve closed
2/12/2013	1:07:33 PM	PH3 valve closed
2/12/2013	1:07:33 PM	SiCl4 pre valve closed
2/12/2013	1:07:33 PM	SiCl4 post valve closed
2/12/2013	1:07:33 PM	Bypass valve closed
2/12/2013	1:07:33 PM	Bubbler valve closed
2/12/2013	1:07:33 PM	Main Vac valve opened
2/12/2013	1:07:33 PM	Helium MFC set to  0.000000
2/12/2013	1:07:33 PM	H2 MFC set to  0.000000
2/12/2013	1:07:33 PM	BCl3 MFC set to  0.000000
2/12/2013	1:07:33 PM	PH3 MFC set to  0.000000
2/12/2013	1:07:33 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:07:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:07:33 PM	Tube furnace set to 0
2/12/2013	1:08:03 PM	H2 valve closed
2/12/2013	1:08:03 PM	BCl3 valve closed
2/12/2013	1:08:03 PM	PH3 valve closed
2/12/2013	1:08:03 PM	SiCl4 pre valve closed
2/12/2013	1:08:03 PM	SiCl4 post valve closed
2/12/2013	1:08:03 PM	Bypass valve closed
2/12/2013	1:08:03 PM	Bubbler valve closed
2/12/2013	1:08:03 PM	Helium valve opened
2/12/2013	1:08:03 PM	Main Vac valve opened
2/12/2013	1:08:03 PM	Helium MFC set to  20.000000
2/12/2013	1:08:03 PM	H2 MFC set to  0.000000
2/12/2013	1:08:03 PM	BCl3 MFC set to  0.000000
2/12/2013	1:08:03 PM	PH3 MFC set to  0.000000
2/12/2013	1:08:03 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:08:03 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:08:03 PM	Tube furnace set to 0
2/12/2013	1:08:33 PM	Helium valve closed
2/12/2013	1:08:33 PM	H2 valve closed
2/12/2013	1:08:33 PM	BCl3 valve closed
2/12/2013	1:08:33 PM	PH3 valve closed
2/12/2013	1:08:33 PM	SiCl4 pre valve closed
2/12/2013	1:08:33 PM	SiCl4 post valve closed
2/12/2013	1:08:33 PM	Bypass valve closed
2/12/2013	1:08:33 PM	Bubbler valve closed
2/12/2013	1:08:33 PM	Main Vac valve opened
2/12/2013	1:08:33 PM	Helium MFC set to  0.000000
2/12/2013	1:08:33 PM	H2 MFC set to  0.000000
2/12/2013	1:08:33 PM	BCl3 MFC set to  0.000000
2/12/2013	1:08:33 PM	PH3 MFC set to  0.000000
2/12/2013	1:08:33 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:08:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:08:33 PM	Tube furnace set to 0
2/12/2013	1:09:03 PM	H2 valve closed
2/12/2013	1:09:03 PM	BCl3 valve closed
2/12/2013	1:09:03 PM	PH3 valve closed
2/12/2013	1:09:03 PM	SiCl4 pre valve closed
2/12/2013	1:09:03 PM	SiCl4 post valve closed
2/12/2013	1:09:03 PM	Bypass valve closed
2/12/2013	1:09:03 PM	Bubbler valve closed
2/12/2013	1:09:03 PM	Helium valve opened
2/12/2013	1:09:03 PM	Main Vac valve opened
2/12/2013	1:09:03 PM	Helium MFC set to  20.000000
2/12/2013	1:09:03 PM	H2 MFC set to  0.000000
2/12/2013	1:09:03 PM	BCl3 MFC set to  0.000000
2/12/2013	1:09:03 PM	PH3 MFC set to  0.000000
2/12/2013	1:09:03 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:09:03 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:09:04 PM	Tube furnace set to 0
2/12/2013	1:09:34 PM	Helium valve closed
2/12/2013	1:09:34 PM	H2 valve closed
2/12/2013	1:09:34 PM	BCl3 valve closed
2/12/2013	1:09:34 PM	PH3 valve closed
2/12/2013	1:09:34 PM	SiCl4 pre valve closed
2/12/2013	1:09:34 PM	SiCl4 post valve closed
2/12/2013	1:09:34 PM	Bypass valve closed
2/12/2013	1:09:34 PM	Bubbler valve closed
2/12/2013	1:09:34 PM	Main Vac valve opened
2/12/2013	1:09:34 PM	Helium MFC set to  0.000000
2/12/2013	1:09:34 PM	H2 MFC set to  0.000000
2/12/2013	1:09:34 PM	BCl3 MFC set to  0.000000
2/12/2013	1:09:34 PM	PH3 MFC set to  0.000000
2/12/2013	1:09:34 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:09:34 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:09:34 PM	Tube furnace set to 0
2/12/2013	1:10:04 PM	H2 valve closed
2/12/2013	1:10:04 PM	BCl3 valve closed
2/12/2013	1:10:04 PM	PH3 valve closed
2/12/2013	1:10:04 PM	SiCl4 pre valve closed
2/12/2013	1:10:04 PM	SiCl4 post valve closed
2/12/2013	1:10:04 PM	Bypass valve closed
2/12/2013	1:10:04 PM	Bubbler valve closed
2/12/2013	1:10:04 PM	Helium valve opened
2/12/2013	1:10:04 PM	Main Vac valve opened
2/12/2013	1:10:04 PM	Helium MFC set to  20.000000
2/12/2013	1:10:04 PM	H2 MFC set to  0.000000
2/12/2013	1:10:04 PM	BCl3 MFC set to  0.000000
2/12/2013	1:10:04 PM	PH3 MFC set to  0.000000
2/12/2013	1:10:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:10:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:10:04 PM	Tube furnace set to 0
2/12/2013	1:10:34 PM	Helium valve closed
2/12/2013	1:10:34 PM	H2 valve closed
2/12/2013	1:10:34 PM	BCl3 valve closed
2/12/2013	1:10:34 PM	PH3 valve closed
2/12/2013	1:10:34 PM	SiCl4 pre valve closed
2/12/2013	1:10:34 PM	SiCl4 post valve closed
2/12/2013	1:10:34 PM	Bypass valve closed
2/12/2013	1:10:34 PM	Bubbler valve closed
2/12/2013	1:10:34 PM	Main Vac valve opened
2/12/2013	1:10:34 PM	Helium MFC set to  0.000000
2/12/2013	1:10:34 PM	H2 MFC set to  0.000000
2/12/2013	1:10:34 PM	BCl3 MFC set to  0.000000
2/12/2013	1:10:34 PM	PH3 MFC set to  0.000000
2/12/2013	1:10:34 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:10:34 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:10:34 PM	Tube furnace set to 0
2/12/2013	1:11:04 PM	H2 valve closed
2/12/2013	1:11:04 PM	BCl3 valve closed
2/12/2013	1:11:04 PM	PH3 valve closed
2/12/2013	1:11:04 PM	SiCl4 pre valve closed
2/12/2013	1:11:04 PM	SiCl4 post valve closed
2/12/2013	1:11:04 PM	Bypass valve closed
2/12/2013	1:11:04 PM	Bubbler valve closed
2/12/2013	1:11:04 PM	Helium valve opened
2/12/2013	1:11:04 PM	Main Vac valve opened
2/12/2013	1:11:04 PM	Helium MFC set to  20.000000
2/12/2013	1:11:04 PM	H2 MFC set to  0.000000
2/12/2013	1:11:04 PM	BCl3 MFC set to  0.000000
2/12/2013	1:11:04 PM	PH3 MFC set to  0.000000
2/12/2013	1:11:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:11:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:11:05 PM	Tube furnace set to 0
2/12/2013	1:11:35 PM	Helium valve closed
2/12/2013	1:11:35 PM	H2 valve closed
2/12/2013	1:11:35 PM	BCl3 valve closed
2/12/2013	1:11:35 PM	PH3 valve closed
2/12/2013	1:11:35 PM	SiCl4 pre valve closed
2/12/2013	1:11:35 PM	SiCl4 post valve closed
2/12/2013	1:11:35 PM	Bypass valve closed
2/12/2013	1:11:35 PM	Bubbler valve closed
2/12/2013	1:11:35 PM	Main Vac valve opened
2/12/2013	1:11:35 PM	Helium MFC set to  0.000000
2/12/2013	1:11:35 PM	H2 MFC set to  0.000000
2/12/2013	1:11:35 PM	BCl3 MFC set to  0.000000
2/12/2013	1:11:35 PM	PH3 MFC set to  0.000000
2/12/2013	1:11:35 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:11:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:11:35 PM	Tube furnace set to 0
2/12/2013	1:12:05 PM	H2 valve closed
2/12/2013	1:12:05 PM	BCl3 valve closed
2/12/2013	1:12:05 PM	PH3 valve closed
2/12/2013	1:12:05 PM	SiCl4 pre valve closed
2/12/2013	1:12:05 PM	SiCl4 post valve closed
2/12/2013	1:12:05 PM	Bypass valve closed
2/12/2013	1:12:05 PM	Bubbler valve closed
2/12/2013	1:12:05 PM	Helium valve opened
2/12/2013	1:12:05 PM	Main Vac valve opened
2/12/2013	1:12:05 PM	Helium MFC set to  20.000000
2/12/2013	1:12:05 PM	H2 MFC set to  0.000000
2/12/2013	1:12:05 PM	BCl3 MFC set to  0.000000
2/12/2013	1:12:05 PM	PH3 MFC set to  0.000000
2/12/2013	1:12:05 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:12:05 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:12:05 PM	Tube furnace set to 0
2/12/2013	1:12:35 PM	Helium valve closed
2/12/2013	1:12:35 PM	H2 valve closed
2/12/2013	1:12:35 PM	BCl3 valve closed
2/12/2013	1:12:35 PM	PH3 valve closed
2/12/2013	1:12:35 PM	SiCl4 pre valve closed
2/12/2013	1:12:35 PM	SiCl4 post valve closed
2/12/2013	1:12:35 PM	Bypass valve closed
2/12/2013	1:12:35 PM	Bubbler valve closed
2/12/2013	1:12:35 PM	Main Vac valve opened
2/12/2013	1:12:35 PM	Helium MFC set to  0.000000
2/12/2013	1:12:35 PM	H2 MFC set to  0.000000
2/12/2013	1:12:35 PM	BCl3 MFC set to  0.000000
2/12/2013	1:12:35 PM	PH3 MFC set to  0.000000
2/12/2013	1:12:35 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:12:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:12:35 PM	Tube furnace set to 0
2/12/2013	1:13:05 PM	H2 valve closed
2/12/2013	1:13:05 PM	BCl3 valve closed
2/12/2013	1:13:05 PM	PH3 valve closed
2/12/2013	1:13:05 PM	SiCl4 pre valve closed
2/12/2013	1:13:05 PM	SiCl4 post valve closed
2/12/2013	1:13:05 PM	Bypass valve closed
2/12/2013	1:13:05 PM	Bubbler valve closed
2/12/2013	1:13:05 PM	Helium valve opened
2/12/2013	1:13:05 PM	Main Vac valve opened
2/12/2013	1:13:05 PM	Helium MFC set to  20.000000
2/12/2013	1:13:05 PM	H2 MFC set to  0.000000
2/12/2013	1:13:05 PM	BCl3 MFC set to  0.000000
2/12/2013	1:13:05 PM	PH3 MFC set to  0.000000
2/12/2013	1:13:05 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:13:05 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:13:06 PM	Tube furnace set to 0
2/12/2013	1:13:36 PM	Helium valve closed
2/12/2013	1:13:36 PM	H2 valve closed
2/12/2013	1:13:36 PM	BCl3 valve closed
2/12/2013	1:13:36 PM	PH3 valve closed
2/12/2013	1:13:36 PM	SiCl4 pre valve closed
2/12/2013	1:13:36 PM	SiCl4 post valve closed
2/12/2013	1:13:36 PM	Bypass valve closed
2/12/2013	1:13:36 PM	Bubbler valve closed
2/12/2013	1:13:36 PM	Main Vac valve opened
2/12/2013	1:13:36 PM	Helium MFC set to  0.000000
2/12/2013	1:13:36 PM	H2 MFC set to  0.000000
2/12/2013	1:13:36 PM	BCl3 MFC set to  0.000000
2/12/2013	1:13:36 PM	PH3 MFC set to  0.000000
2/12/2013	1:13:36 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:13:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:13:36 PM	Tube furnace set to 0
2/12/2013	1:14:06 PM	H2 valve closed
2/12/2013	1:14:06 PM	BCl3 valve closed
2/12/2013	1:14:06 PM	PH3 valve closed
2/12/2013	1:14:06 PM	SiCl4 pre valve closed
2/12/2013	1:14:06 PM	SiCl4 post valve closed
2/12/2013	1:14:06 PM	Bypass valve closed
2/12/2013	1:14:06 PM	Bubbler valve closed
2/12/2013	1:14:06 PM	Helium valve opened
2/12/2013	1:14:06 PM	Main Vac valve opened
2/12/2013	1:14:06 PM	Helium MFC set to  20.000000
2/12/2013	1:14:06 PM	H2 MFC set to  0.000000
2/12/2013	1:14:06 PM	BCl3 MFC set to  0.000000
2/12/2013	1:14:06 PM	PH3 MFC set to  0.000000
2/12/2013	1:14:06 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:14:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:14:06 PM	Tube furnace set to 0
2/12/2013	1:14:36 PM	Helium valve closed
2/12/2013	1:14:36 PM	H2 valve closed
2/12/2013	1:14:36 PM	BCl3 valve closed
2/12/2013	1:14:36 PM	PH3 valve closed
2/12/2013	1:14:36 PM	SiCl4 pre valve closed
2/12/2013	1:14:36 PM	SiCl4 post valve closed
2/12/2013	1:14:36 PM	Bypass valve closed
2/12/2013	1:14:36 PM	Bubbler valve closed
2/12/2013	1:14:36 PM	Main Vac valve opened
2/12/2013	1:14:36 PM	Helium MFC set to  0.000000
2/12/2013	1:14:36 PM	H2 MFC set to  0.000000
2/12/2013	1:14:36 PM	BCl3 MFC set to  0.000000
2/12/2013	1:14:36 PM	PH3 MFC set to  0.000000
2/12/2013	1:14:36 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:14:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:14:36 PM	Tube furnace set to 0
2/12/2013	1:14:37 PM	Run finished at 1:14 PM
2/12/2013	1:14:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	1:21:59 PM	Main Vac valve closed
2/12/2013	1:22:11 PM	Main Vac valve opened
2/12/2013	1:35:30 PM	Main Vac valve closed
2/12/2013	1:35:43 PM	Main Vac valve opened
2/12/2013	1:37:37 PM	Recipe started at 1:37 PM
2/12/2013	1:37:37 PM	Helium valve closed
2/12/2013	1:37:37 PM	H2 valve closed
2/12/2013	1:37:37 PM	BCl3 valve closed
2/12/2013	1:37:37 PM	SiCl4 pre valve closed
2/12/2013	1:37:37 PM	SiCl4 post valve closed
2/12/2013	1:37:37 PM	Main Vac valve closed
2/12/2013	1:37:37 PM	Bypass valve closed
2/12/2013	1:37:37 PM	Bubbler valve closed
2/12/2013	1:37:37 PM	PH3 valve opened
2/12/2013	1:37:37 PM	Helium MFC set to  0.000000
2/12/2013	1:37:37 PM	H2 MFC set to  0.000000
2/12/2013	1:37:37 PM	BCl3 MFC set to  0.000000
2/12/2013	1:37:37 PM	PH3 MFC set to  0.000000
2/12/2013	1:37:37 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:37:37 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:37:37 PM	Tube furnace set to 0
2/12/2013	1:37:40 PM	Helium valve closed
2/12/2013	1:37:40 PM	BCl3 valve closed
2/12/2013	1:37:40 PM	PH3 valve closed
2/12/2013	1:37:40 PM	SiCl4 pre valve closed
2/12/2013	1:37:40 PM	SiCl4 post valve closed
2/12/2013	1:37:40 PM	Main Vac valve closed
2/12/2013	1:37:40 PM	Bypass valve closed
2/12/2013	1:37:40 PM	Bubbler valve closed
2/12/2013	1:37:40 PM	H2 valve opened
2/12/2013	1:37:40 PM	Helium MFC set to  0.000000
2/12/2013	1:37:40 PM	H2 MFC set to  500.000000
2/12/2013	1:37:40 PM	BCl3 MFC set to  0.000000
2/12/2013	1:37:40 PM	PH3 MFC set to  0.000000
2/12/2013	1:37:40 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:37:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:37:40 PM	Tube furnace set to 0
2/12/2013	1:38:52 PM	Helium valve closed
2/12/2013	1:38:52 PM	BCl3 valve closed
2/12/2013	1:38:52 PM	PH3 valve closed
2/12/2013	1:38:52 PM	SiCl4 pre valve closed
2/12/2013	1:38:52 PM	SiCl4 post valve closed
2/12/2013	1:38:52 PM	Main Vac valve closed
2/12/2013	1:38:52 PM	Bypass valve closed
2/12/2013	1:38:52 PM	H2 valve opened
2/12/2013	1:38:52 PM	Bubbler valve opened
2/12/2013	1:38:52 PM	Helium MFC set to  0.000000
2/12/2013	1:38:52 PM	H2 MFC set to  500.000000
2/12/2013	1:38:52 PM	BCl3 MFC set to  0.000000
2/12/2013	1:38:52 PM	PH3 MFC set to  0.000000
2/12/2013	1:38:52 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:38:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:38:52 PM	Tube furnace set to 0
2/12/2013	1:38:53 PM	Helium valve closed
2/12/2013	1:38:53 PM	BCl3 valve closed
2/12/2013	1:38:53 PM	PH3 valve closed
2/12/2013	1:38:53 PM	SiCl4 pre valve closed
2/12/2013	1:38:53 PM	SiCl4 post valve closed
2/12/2013	1:38:53 PM	Main Vac valve closed
2/12/2013	1:38:53 PM	Bypass valve closed
2/12/2013	1:38:53 PM	H2 valve opened
2/12/2013	1:38:53 PM	Bubbler valve opened
2/12/2013	1:38:53 PM	Helium MFC set to  0.000000
2/12/2013	1:38:53 PM	H2 MFC set to  500.000000
2/12/2013	1:38:53 PM	BCl3 MFC set to  0.000000
2/12/2013	1:38:53 PM	PH3 MFC set to  0.000000
2/12/2013	1:38:53 PM	SiCl4 MFC set to  0.000000
2/12/2013	1:38:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:38:54 PM	Tube furnace set to 1000
2/12/2013	1:58:54 PM	Helium valve closed
2/12/2013	1:58:54 PM	PH3 valve closed
2/12/2013	1:58:54 PM	Main Vac valve closed
2/12/2013	1:58:54 PM	Bypass valve closed
2/12/2013	1:58:54 PM	H2 valve opened
2/12/2013	1:58:54 PM	BCl3 valve opened
2/12/2013	1:58:54 PM	SiCl4 pre valve opened
2/12/2013	1:58:54 PM	SiCl4 post valve opened
2/12/2013	1:58:54 PM	Bubbler valve opened
2/12/2013	1:58:54 PM	Helium MFC set to  0.000000
2/12/2013	1:58:54 PM	H2 MFC set to  450.000000
2/12/2013	1:58:54 PM	BCl3 MFC set to  1.300000
2/12/2013	1:58:54 PM	PH3 MFC set to  0.000000
2/12/2013	1:58:54 PM	SiCl4 MFC set to  50.000000
2/12/2013	1:58:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	1:58:54 PM	Tube furnace set to 1000
2/12/2013	2:10:54 PM	Helium valve closed
2/12/2013	2:10:54 PM	BCl3 valve closed
2/12/2013	2:10:54 PM	PH3 valve closed
2/12/2013	2:10:54 PM	SiCl4 pre valve closed
2/12/2013	2:10:54 PM	SiCl4 post valve closed
2/12/2013	2:10:54 PM	Main Vac valve closed
2/12/2013	2:10:54 PM	Bypass valve closed
2/12/2013	2:10:54 PM	H2 valve opened
2/12/2013	2:10:54 PM	Bubbler valve opened
2/12/2013	2:10:54 PM	Helium MFC set to  0.000000
2/12/2013	2:10:54 PM	H2 MFC set to  500.000000
2/12/2013	2:10:54 PM	BCl3 MFC set to  0.000000
2/12/2013	2:10:54 PM	PH3 MFC set to  0.000000
2/12/2013	2:10:54 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:10:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:10:54 PM	Tube furnace set to 900
2/12/2013	2:15:54 PM	Helium valve closed
2/12/2013	2:15:54 PM	BCl3 valve closed
2/12/2013	2:15:54 PM	PH3 valve closed
2/12/2013	2:15:54 PM	SiCl4 pre valve closed
2/12/2013	2:15:54 PM	SiCl4 post valve closed
2/12/2013	2:15:54 PM	Main Vac valve closed
2/12/2013	2:15:54 PM	Bypass valve closed
2/12/2013	2:15:54 PM	H2 valve opened
2/12/2013	2:15:54 PM	Bubbler valve opened
2/12/2013	2:15:54 PM	Helium MFC set to  0.000000
2/12/2013	2:15:54 PM	H2 MFC set to  500.000000
2/12/2013	2:15:54 PM	BCl3 MFC set to  0.000000
2/12/2013	2:15:54 PM	PH3 MFC set to  0.000000
2/12/2013	2:15:54 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:15:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:15:54 PM	Tube furnace set to 800
2/12/2013	2:20:54 PM	Helium valve closed
2/12/2013	2:20:54 PM	BCl3 valve closed
2/12/2013	2:20:54 PM	PH3 valve closed
2/12/2013	2:20:54 PM	SiCl4 pre valve closed
2/12/2013	2:20:54 PM	SiCl4 post valve closed
2/12/2013	2:20:54 PM	Main Vac valve closed
2/12/2013	2:20:54 PM	Bypass valve closed
2/12/2013	2:20:54 PM	H2 valve opened
2/12/2013	2:20:54 PM	Bubbler valve opened
2/12/2013	2:20:54 PM	Helium MFC set to  0.000000
2/12/2013	2:20:54 PM	H2 MFC set to  500.000000
2/12/2013	2:20:54 PM	BCl3 MFC set to  0.000000
2/12/2013	2:20:54 PM	PH3 MFC set to  0.000000
2/12/2013	2:20:54 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:20:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:20:55 PM	Tube furnace set to 700
2/12/2013	2:25:55 PM	Helium valve closed
2/12/2013	2:25:55 PM	BCl3 valve closed
2/12/2013	2:25:55 PM	PH3 valve closed
2/12/2013	2:25:55 PM	SiCl4 pre valve closed
2/12/2013	2:25:55 PM	SiCl4 post valve closed
2/12/2013	2:25:55 PM	Main Vac valve closed
2/12/2013	2:25:55 PM	Bypass valve closed
2/12/2013	2:25:55 PM	H2 valve opened
2/12/2013	2:25:55 PM	Bubbler valve opened
2/12/2013	2:25:55 PM	Helium MFC set to  0.000000
2/12/2013	2:25:55 PM	H2 MFC set to  500.000000
2/12/2013	2:25:55 PM	BCl3 MFC set to  0.000000
2/12/2013	2:25:55 PM	PH3 MFC set to  0.000000
2/12/2013	2:25:55 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:25:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:25:55 PM	Tube furnace set to 600
2/12/2013	2:30:55 PM	H2 valve closed
2/12/2013	2:30:55 PM	BCl3 valve closed
2/12/2013	2:30:55 PM	PH3 valve closed
2/12/2013	2:30:55 PM	SiCl4 pre valve closed
2/12/2013	2:30:55 PM	SiCl4 post valve closed
2/12/2013	2:30:55 PM	Main Vac valve closed
2/12/2013	2:30:55 PM	Bypass valve closed
2/12/2013	2:30:55 PM	Helium valve opened
2/12/2013	2:30:55 PM	Bubbler valve opened
2/12/2013	2:30:55 PM	Helium MFC set to  500.000000
2/12/2013	2:30:55 PM	H2 MFC set to  0.000000
2/12/2013	2:30:55 PM	BCl3 MFC set to  0.000000
2/12/2013	2:30:55 PM	PH3 MFC set to  0.000000
2/12/2013	2:30:55 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:30:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:30:55 PM	Tube furnace set to 0
2/12/2013	2:31:17 PM	Run aborted at 2:31 PM
2/12/2013	2:31:17 PM	Helium valve closed
2/12/2013	2:31:17 PM	H2 valve closed
2/12/2013	2:31:17 PM	BCl3 valve closed
2/12/2013	2:31:17 PM	PH3 valve closed
2/12/2013	2:31:17 PM	SiCl4 pre valve closed
2/12/2013	2:31:17 PM	SiCl4 post valve closed
2/12/2013	2:31:17 PM	Bypass valve closed
2/12/2013	2:31:17 PM	Main Vac valve closed
2/12/2013	2:31:17 PM	Bubbler valve closed
2/12/2013	2:31:17 PM	Helium MFC set to  0.000000
2/12/2013	2:31:17 PM	H2 MFC set to  0.000000
2/12/2013	2:31:17 PM	BCl3 MFC set to  0.000000
2/12/2013	2:31:17 PM	PH3 MFC set to  0.000000
2/12/2013	2:31:17 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:31:17 PM	Tube furnace set to 0
2/12/2013	2:31:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	2:31:40 PM	Recipe started at 2:31 PM
2/12/2013	2:31:40 PM	Helium valve closed
2/12/2013	2:31:40 PM	H2 valve closed
2/12/2013	2:31:40 PM	BCl3 valve closed
2/12/2013	2:31:40 PM	PH3 valve closed
2/12/2013	2:31:40 PM	SiCl4 pre valve closed
2/12/2013	2:31:40 PM	SiCl4 post valve closed
2/12/2013	2:31:40 PM	Main Vac valve closed
2/12/2013	2:31:40 PM	Bypass valve closed
2/12/2013	2:31:40 PM	Bubbler valve closed
2/12/2013	2:31:40 PM	Helium MFC set to  0.000000
2/12/2013	2:31:40 PM	H2 MFC set to  0.000000
2/12/2013	2:31:40 PM	BCl3 MFC set to  0.000000
2/12/2013	2:31:40 PM	PH3 MFC set to  0.000000
2/12/2013	2:31:40 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:31:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:31:40 PM	Tube furnace set to 0
2/12/2013	2:31:43 PM	H2 valve closed
2/12/2013	2:31:43 PM	BCl3 valve closed
2/12/2013	2:31:43 PM	PH3 valve closed
2/12/2013	2:31:43 PM	SiCl4 pre valve closed
2/12/2013	2:31:43 PM	SiCl4 post valve closed
2/12/2013	2:31:43 PM	Main Vac valve closed
2/12/2013	2:31:43 PM	Bypass valve closed
2/12/2013	2:31:43 PM	Bubbler valve closed
2/12/2013	2:31:43 PM	Helium valve opened
2/12/2013	2:31:43 PM	Helium MFC set to  500.000000
2/12/2013	2:31:43 PM	H2 MFC set to  0.000000
2/12/2013	2:31:43 PM	BCl3 MFC set to  0.000000
2/12/2013	2:31:43 PM	PH3 MFC set to  0.000000
2/12/2013	2:31:43 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:31:43 PM	Tube furnace set to 0
2/12/2013	2:31:43 PM	Helium valve closed
2/12/2013	2:31:43 PM	H2 valve closed
2/12/2013	2:31:43 PM	BCl3 valve closed
2/12/2013	2:31:43 PM	PH3 valve closed
2/12/2013	2:31:43 PM	SiCl4 pre valve closed
2/12/2013	2:31:43 PM	SiCl4 post valve closed
2/12/2013	2:31:43 PM	Main Vac valve closed
2/12/2013	2:31:43 PM	Bypass valve closed
2/12/2013	2:31:43 PM	Bubbler valve closed
2/12/2013	2:31:43 PM	Helium MFC set to  0.000000
2/12/2013	2:31:43 PM	H2 MFC set to  0.000000
2/12/2013	2:31:43 PM	BCl3 MFC set to  0.000000
2/12/2013	2:31:43 PM	PH3 MFC set to  0.000000
2/12/2013	2:31:43 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:31:44 PM	Tube furnace set to 0
2/12/2013	2:31:45 PM	Run finished at 2:31 PM
2/12/2013	2:31:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	2:46:34 PM	Tube furnace set to 200
2/12/2013	2:46:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	2:46:36 PM	Recipe started at 2:46 PM
2/12/2013	2:46:36 PM	Helium valve closed
2/12/2013	2:46:36 PM	H2 valve closed
2/12/2013	2:46:36 PM	BCl3 valve closed
2/12/2013	2:46:36 PM	PH3 valve closed
2/12/2013	2:46:36 PM	SiCl4 pre valve closed
2/12/2013	2:46:36 PM	SiCl4 post valve closed
2/12/2013	2:46:36 PM	Main Vac valve closed
2/12/2013	2:46:36 PM	Bubbler valve closed
2/12/2013	2:46:36 PM	Bypass valve opened
2/12/2013	2:46:36 PM	Helium MFC set to  0.000000
2/12/2013	2:46:36 PM	H2 MFC set to  0.000000
2/12/2013	2:46:36 PM	BCl3 MFC set to  0.000000
2/12/2013	2:46:36 PM	PH3 MFC set to  0.000000
2/12/2013	2:46:36 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:46:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:46:36 PM	Tube furnace set to 0
2/12/2013	2:47:56 PM	Run aborted at 2:47 PM
2/12/2013	2:47:56 PM	Helium valve closed
2/12/2013	2:47:56 PM	H2 valve closed
2/12/2013	2:47:56 PM	BCl3 valve closed
2/12/2013	2:47:56 PM	PH3 valve closed
2/12/2013	2:47:56 PM	SiCl4 pre valve closed
2/12/2013	2:47:56 PM	SiCl4 post valve closed
2/12/2013	2:47:56 PM	Bypass valve closed
2/12/2013	2:47:56 PM	Main Vac valve closed
2/12/2013	2:47:56 PM	Bubbler valve closed
2/12/2013	2:47:56 PM	Helium MFC set to  0.000000
2/12/2013	2:47:56 PM	H2 MFC set to  0.000000
2/12/2013	2:47:56 PM	BCl3 MFC set to  0.000000
2/12/2013	2:47:56 PM	PH3 MFC set to  0.000000
2/12/2013	2:47:56 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:47:56 PM	Tube furnace set to 0
2/12/2013	2:47:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	2:48:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	2:48:14 PM	Recipe started at 2:48 PM
2/12/2013	2:48:14 PM	Helium valve closed
2/12/2013	2:48:14 PM	H2 valve closed
2/12/2013	2:48:14 PM	BCl3 valve closed
2/12/2013	2:48:14 PM	PH3 valve closed
2/12/2013	2:48:14 PM	SiCl4 pre valve closed
2/12/2013	2:48:15 PM	SiCl4 post valve closed
2/12/2013	2:48:15 PM	Main Vac valve closed
2/12/2013	2:48:15 PM	Bypass valve closed
2/12/2013	2:48:15 PM	Bubbler valve closed
2/12/2013	2:48:15 PM	Helium MFC set to  0.000000
2/12/2013	2:48:15 PM	H2 MFC set to  0.000000
2/12/2013	2:48:15 PM	BCl3 MFC set to  0.000000
2/12/2013	2:48:15 PM	PH3 MFC set to  0.000000
2/12/2013	2:48:15 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:48:15 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:48:15 PM	Tube furnace set to 0
2/12/2013	2:48:18 PM	H2 valve closed
2/12/2013	2:48:18 PM	BCl3 valve closed
2/12/2013	2:48:18 PM	PH3 valve closed
2/12/2013	2:48:18 PM	SiCl4 pre valve closed
2/12/2013	2:48:18 PM	SiCl4 post valve closed
2/12/2013	2:48:18 PM	Main Vac valve closed
2/12/2013	2:48:18 PM	Bypass valve closed
2/12/2013	2:48:18 PM	Bubbler valve closed
2/12/2013	2:48:18 PM	Helium valve opened
2/12/2013	2:48:18 PM	Helium MFC set to  500.000000
2/12/2013	2:48:18 PM	H2 MFC set to  0.000000
2/12/2013	2:48:18 PM	BCl3 MFC set to  0.000000
2/12/2013	2:48:18 PM	PH3 MFC set to  0.000000
2/12/2013	2:48:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:48:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:48:18 PM	Tube furnace set to 0
2/12/2013	2:48:18 PM	Helium valve closed
2/12/2013	2:48:18 PM	H2 valve closed
2/12/2013	2:48:18 PM	BCl3 valve closed
2/12/2013	2:48:18 PM	PH3 valve closed
2/12/2013	2:48:18 PM	SiCl4 pre valve closed
2/12/2013	2:48:18 PM	SiCl4 post valve closed
2/12/2013	2:48:18 PM	Main Vac valve closed
2/12/2013	2:48:18 PM	Bypass valve closed
2/12/2013	2:48:18 PM	Bubbler valve closed
2/12/2013	2:48:18 PM	Helium MFC set to  0.000000
2/12/2013	2:48:18 PM	H2 MFC set to  0.000000
2/12/2013	2:48:18 PM	BCl3 MFC set to  0.000000
2/12/2013	2:48:18 PM	PH3 MFC set to  0.000000
2/12/2013	2:48:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:48:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:48:18 PM	Tube furnace set to 0
2/12/2013	2:48:19 PM	Run finished at 2:48 PM
2/12/2013	2:48:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	2:52:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	2:52:37 PM	Recipe started at 2:52 PM
2/12/2013	2:52:37 PM	Helium valve closed
2/12/2013	2:52:37 PM	H2 valve closed
2/12/2013	2:52:37 PM	BCl3 valve closed
2/12/2013	2:52:37 PM	PH3 valve closed
2/12/2013	2:52:37 PM	SiCl4 pre valve closed
2/12/2013	2:52:37 PM	SiCl4 post valve closed
2/12/2013	2:52:37 PM	Main Vac valve closed
2/12/2013	2:52:37 PM	Bubbler valve closed
2/12/2013	2:52:37 PM	Bypass valve opened
2/12/2013	2:52:37 PM	Helium MFC set to  0.000000
2/12/2013	2:52:37 PM	H2 MFC set to  0.000000
2/12/2013	2:52:37 PM	BCl3 MFC set to  0.000000
2/12/2013	2:52:37 PM	PH3 MFC set to  0.000000
2/12/2013	2:52:37 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:52:37 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:52:38 PM	Tube furnace set to 0
2/12/2013	2:54:07 PM	Helium valve closed
2/12/2013	2:54:07 PM	H2 valve closed
2/12/2013	2:54:07 PM	BCl3 valve closed
2/12/2013	2:54:07 PM	PH3 valve closed
2/12/2013	2:54:07 PM	SiCl4 pre valve closed
2/12/2013	2:54:07 PM	SiCl4 post valve closed
2/12/2013	2:54:07 PM	Main Vac valve closed
2/12/2013	2:54:07 PM	Bubbler valve closed
2/12/2013	2:54:07 PM	Bypass valve opened
2/12/2013	2:54:07 PM	Helium MFC set to  0.000000
2/12/2013	2:54:07 PM	H2 MFC set to  0.000000
2/12/2013	2:54:07 PM	BCl3 MFC set to  0.000000
2/12/2013	2:54:07 PM	PH3 MFC set to  0.000000
2/12/2013	2:54:07 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:54:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:54:08 PM	Tube furnace set to 0
2/12/2013	2:55:08 PM	Helium valve closed
2/12/2013	2:55:08 PM	H2 valve closed
2/12/2013	2:55:08 PM	BCl3 valve closed
2/12/2013	2:55:08 PM	PH3 valve closed
2/12/2013	2:55:08 PM	SiCl4 pre valve closed
2/12/2013	2:55:08 PM	SiCl4 post valve closed
2/12/2013	2:55:08 PM	Bypass valve closed
2/12/2013	2:55:08 PM	Bubbler valve closed
2/12/2013	2:55:08 PM	Main Vac valve opened
2/12/2013	2:55:08 PM	Helium MFC set to  0.000000
2/12/2013	2:55:08 PM	H2 MFC set to  0.000000
2/12/2013	2:55:08 PM	BCl3 MFC set to  0.000000
2/12/2013	2:55:08 PM	PH3 MFC set to  0.000000
2/12/2013	2:55:08 PM	SiCl4 MFC set to  0.000000
2/12/2013	2:55:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	2:55:08 PM	Tube furnace set to 0
2/12/2013	2:55:09 PM	Run finished at 2:55 PM
2/12/2013	2:55:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	2:55:13 PM	Tube furnace set to 200
2/12/2013	3:20:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	3:20:46 PM	Recipe started at 3:20 PM
2/12/2013	3:20:46 PM	Helium valve closed
2/12/2013	3:20:46 PM	H2 valve closed
2/12/2013	3:20:46 PM	BCl3 valve closed
2/12/2013	3:20:46 PM	PH3 valve closed
2/12/2013	3:20:46 PM	SiCl4 pre valve closed
2/12/2013	3:20:46 PM	SiCl4 post valve closed
2/12/2013	3:20:46 PM	Main Vac valve closed
2/12/2013	3:20:46 PM	Bubbler valve closed
2/12/2013	3:20:46 PM	Bypass valve opened
2/12/2013	3:20:46 PM	Helium MFC set to  0.000000
2/12/2013	3:20:46 PM	H2 MFC set to  0.000000
2/12/2013	3:20:46 PM	BCl3 MFC set to  0.000000
2/12/2013	3:20:46 PM	PH3 MFC set to  0.000000
2/12/2013	3:20:46 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:20:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:20:46 PM	Tube furnace set to 0
2/12/2013	3:20:47 PM	Helium valve closed
2/12/2013	3:20:47 PM	H2 valve closed
2/12/2013	3:20:47 PM	BCl3 valve closed
2/12/2013	3:20:47 PM	PH3 valve closed
2/12/2013	3:20:47 PM	SiCl4 pre valve closed
2/12/2013	3:20:47 PM	SiCl4 post valve closed
2/12/2013	3:20:47 PM	Main Vac valve closed
2/12/2013	3:20:47 PM	Bubbler valve closed
2/12/2013	3:20:47 PM	Bypass valve opened
2/12/2013	3:20:47 PM	Helium MFC set to  0.000000
2/12/2013	3:20:47 PM	H2 MFC set to  0.000000
2/12/2013	3:20:47 PM	BCl3 MFC set to  0.000000
2/12/2013	3:20:47 PM	PH3 MFC set to  0.000000
2/12/2013	3:20:47 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:20:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:20:47 PM	Tube furnace set to 0
2/12/2013	3:21:17 PM	Helium valve closed
2/12/2013	3:21:17 PM	H2 valve closed
2/12/2013	3:21:17 PM	BCl3 valve closed
2/12/2013	3:21:17 PM	PH3 valve closed
2/12/2013	3:21:17 PM	SiCl4 pre valve closed
2/12/2013	3:21:17 PM	SiCl4 post valve closed
2/12/2013	3:21:17 PM	Bypass valve closed
2/12/2013	3:21:17 PM	Bubbler valve closed
2/12/2013	3:21:17 PM	Main Vac valve opened
2/12/2013	3:21:17 PM	Helium MFC set to  0.000000
2/12/2013	3:21:17 PM	H2 MFC set to  0.000000
2/12/2013	3:21:17 PM	BCl3 MFC set to  0.000000
2/12/2013	3:21:17 PM	PH3 MFC set to  0.000000
2/12/2013	3:21:17 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:21:17 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:21:17 PM	Tube furnace set to 0
2/12/2013	3:21:47 PM	H2 valve closed
2/12/2013	3:21:47 PM	BCl3 valve closed
2/12/2013	3:21:47 PM	PH3 valve closed
2/12/2013	3:21:47 PM	SiCl4 pre valve closed
2/12/2013	3:21:47 PM	SiCl4 post valve closed
2/12/2013	3:21:47 PM	Bypass valve closed
2/12/2013	3:21:47 PM	Bubbler valve closed
2/12/2013	3:21:47 PM	Helium valve opened
2/12/2013	3:21:47 PM	Main Vac valve opened
2/12/2013	3:21:47 PM	Helium MFC set to  20.000000
2/12/2013	3:21:47 PM	H2 MFC set to  0.000000
2/12/2013	3:21:47 PM	BCl3 MFC set to  0.000000
2/12/2013	3:21:47 PM	PH3 MFC set to  0.000000
2/12/2013	3:21:47 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:21:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:21:47 PM	Tube furnace set to 0
2/12/2013	3:22:17 PM	Helium valve closed
2/12/2013	3:22:17 PM	H2 valve closed
2/12/2013	3:22:17 PM	BCl3 valve closed
2/12/2013	3:22:17 PM	PH3 valve closed
2/12/2013	3:22:17 PM	SiCl4 pre valve closed
2/12/2013	3:22:17 PM	SiCl4 post valve closed
2/12/2013	3:22:17 PM	Bypass valve closed
2/12/2013	3:22:17 PM	Bubbler valve closed
2/12/2013	3:22:18 PM	Main Vac valve opened
2/12/2013	3:22:18 PM	Helium MFC set to  0.000000
2/12/2013	3:22:18 PM	H2 MFC set to  0.000000
2/12/2013	3:22:18 PM	BCl3 MFC set to  0.000000
2/12/2013	3:22:18 PM	PH3 MFC set to  0.000000
2/12/2013	3:22:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:22:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:22:18 PM	Tube furnace set to 0
2/12/2013	3:22:48 PM	H2 valve closed
2/12/2013	3:22:48 PM	BCl3 valve closed
2/12/2013	3:22:48 PM	PH3 valve closed
2/12/2013	3:22:48 PM	SiCl4 pre valve closed
2/12/2013	3:22:48 PM	SiCl4 post valve closed
2/12/2013	3:22:48 PM	Bypass valve closed
2/12/2013	3:22:48 PM	Bubbler valve closed
2/12/2013	3:22:48 PM	Helium valve opened
2/12/2013	3:22:48 PM	Main Vac valve opened
2/12/2013	3:22:48 PM	Helium MFC set to  20.000000
2/12/2013	3:22:48 PM	H2 MFC set to  0.000000
2/12/2013	3:22:48 PM	BCl3 MFC set to  0.000000
2/12/2013	3:22:48 PM	PH3 MFC set to  0.000000
2/12/2013	3:22:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:22:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:22:48 PM	Tube furnace set to 0
2/12/2013	3:23:18 PM	Helium valve closed
2/12/2013	3:23:18 PM	H2 valve closed
2/12/2013	3:23:18 PM	BCl3 valve closed
2/12/2013	3:23:18 PM	PH3 valve closed
2/12/2013	3:23:18 PM	SiCl4 pre valve closed
2/12/2013	3:23:18 PM	SiCl4 post valve closed
2/12/2013	3:23:18 PM	Bypass valve closed
2/12/2013	3:23:18 PM	Bubbler valve closed
2/12/2013	3:23:18 PM	Main Vac valve opened
2/12/2013	3:23:18 PM	Helium MFC set to  0.000000
2/12/2013	3:23:18 PM	H2 MFC set to  0.000000
2/12/2013	3:23:18 PM	BCl3 MFC set to  0.000000
2/12/2013	3:23:18 PM	PH3 MFC set to  0.000000
2/12/2013	3:23:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:23:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:23:18 PM	Tube furnace set to 0
2/12/2013	3:23:48 PM	H2 valve closed
2/12/2013	3:23:48 PM	BCl3 valve closed
2/12/2013	3:23:48 PM	PH3 valve closed
2/12/2013	3:23:48 PM	SiCl4 pre valve closed
2/12/2013	3:23:48 PM	SiCl4 post valve closed
2/12/2013	3:23:48 PM	Bypass valve closed
2/12/2013	3:23:48 PM	Bubbler valve closed
2/12/2013	3:23:48 PM	Helium valve opened
2/12/2013	3:23:48 PM	Main Vac valve opened
2/12/2013	3:23:48 PM	Helium MFC set to  20.000000
2/12/2013	3:23:48 PM	H2 MFC set to  0.000000
2/12/2013	3:23:48 PM	BCl3 MFC set to  0.000000
2/12/2013	3:23:48 PM	PH3 MFC set to  0.000000
2/12/2013	3:23:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:23:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:23:48 PM	Tube furnace set to 0
2/12/2013	3:24:18 PM	Helium valve closed
2/12/2013	3:24:18 PM	H2 valve closed
2/12/2013	3:24:18 PM	BCl3 valve closed
2/12/2013	3:24:18 PM	PH3 valve closed
2/12/2013	3:24:18 PM	SiCl4 pre valve closed
2/12/2013	3:24:18 PM	SiCl4 post valve closed
2/12/2013	3:24:18 PM	Bypass valve closed
2/12/2013	3:24:18 PM	Bubbler valve closed
2/12/2013	3:24:18 PM	Main Vac valve opened
2/12/2013	3:24:18 PM	Helium MFC set to  0.000000
2/12/2013	3:24:18 PM	H2 MFC set to  0.000000
2/12/2013	3:24:18 PM	BCl3 MFC set to  0.000000
2/12/2013	3:24:19 PM	PH3 MFC set to  0.000000
2/12/2013	3:24:19 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:24:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:24:19 PM	Tube furnace set to 0
2/12/2013	3:24:49 PM	H2 valve closed
2/12/2013	3:24:49 PM	BCl3 valve closed
2/12/2013	3:24:49 PM	PH3 valve closed
2/12/2013	3:24:49 PM	SiCl4 pre valve closed
2/12/2013	3:24:49 PM	SiCl4 post valve closed
2/12/2013	3:24:49 PM	Bypass valve closed
2/12/2013	3:24:49 PM	Bubbler valve closed
2/12/2013	3:24:49 PM	Helium valve opened
2/12/2013	3:24:49 PM	Main Vac valve opened
2/12/2013	3:24:49 PM	Helium MFC set to  20.000000
2/12/2013	3:24:49 PM	H2 MFC set to  0.000000
2/12/2013	3:24:49 PM	BCl3 MFC set to  0.000000
2/12/2013	3:24:49 PM	PH3 MFC set to  0.000000
2/12/2013	3:24:49 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:24:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:24:49 PM	Tube furnace set to 0
2/12/2013	3:25:19 PM	Helium valve closed
2/12/2013	3:25:19 PM	H2 valve closed
2/12/2013	3:25:19 PM	BCl3 valve closed
2/12/2013	3:25:19 PM	PH3 valve closed
2/12/2013	3:25:19 PM	SiCl4 pre valve closed
2/12/2013	3:25:19 PM	SiCl4 post valve closed
2/12/2013	3:25:19 PM	Bypass valve closed
2/12/2013	3:25:19 PM	Bubbler valve closed
2/12/2013	3:25:19 PM	Main Vac valve opened
2/12/2013	3:25:19 PM	Helium MFC set to  0.000000
2/12/2013	3:25:19 PM	H2 MFC set to  0.000000
2/12/2013	3:25:19 PM	BCl3 MFC set to  0.000000
2/12/2013	3:25:19 PM	PH3 MFC set to  0.000000
2/12/2013	3:25:19 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:25:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:25:19 PM	Tube furnace set to 0
2/12/2013	3:25:49 PM	H2 valve closed
2/12/2013	3:25:49 PM	BCl3 valve closed
2/12/2013	3:25:49 PM	PH3 valve closed
2/12/2013	3:25:49 PM	SiCl4 pre valve closed
2/12/2013	3:25:49 PM	SiCl4 post valve closed
2/12/2013	3:25:49 PM	Bypass valve closed
2/12/2013	3:25:49 PM	Bubbler valve closed
2/12/2013	3:25:49 PM	Helium valve opened
2/12/2013	3:25:49 PM	Main Vac valve opened
2/12/2013	3:25:49 PM	Helium MFC set to  20.000000
2/12/2013	3:25:49 PM	H2 MFC set to  0.000000
2/12/2013	3:25:49 PM	BCl3 MFC set to  0.000000
2/12/2013	3:25:49 PM	PH3 MFC set to  0.000000
2/12/2013	3:25:49 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:25:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:25:49 PM	Tube furnace set to 0
2/12/2013	3:26:19 PM	Helium valve closed
2/12/2013	3:26:19 PM	H2 valve closed
2/12/2013	3:26:19 PM	BCl3 valve closed
2/12/2013	3:26:19 PM	PH3 valve closed
2/12/2013	3:26:19 PM	SiCl4 pre valve closed
2/12/2013	3:26:19 PM	SiCl4 post valve closed
2/12/2013	3:26:19 PM	Bypass valve closed
2/12/2013	3:26:19 PM	Bubbler valve closed
2/12/2013	3:26:19 PM	Main Vac valve opened
2/12/2013	3:26:19 PM	Helium MFC set to  0.000000
2/12/2013	3:26:19 PM	H2 MFC set to  0.000000
2/12/2013	3:26:19 PM	BCl3 MFC set to  0.000000
2/12/2013	3:26:19 PM	PH3 MFC set to  0.000000
2/12/2013	3:26:19 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:26:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:26:20 PM	Tube furnace set to 0
2/12/2013	3:26:50 PM	H2 valve closed
2/12/2013	3:26:50 PM	BCl3 valve closed
2/12/2013	3:26:50 PM	PH3 valve closed
2/12/2013	3:26:50 PM	SiCl4 pre valve closed
2/12/2013	3:26:50 PM	SiCl4 post valve closed
2/12/2013	3:26:50 PM	Bypass valve closed
2/12/2013	3:26:50 PM	Bubbler valve closed
2/12/2013	3:26:50 PM	Helium valve opened
2/12/2013	3:26:50 PM	Main Vac valve opened
2/12/2013	3:26:50 PM	Helium MFC set to  20.000000
2/12/2013	3:26:50 PM	H2 MFC set to  0.000000
2/12/2013	3:26:50 PM	BCl3 MFC set to  0.000000
2/12/2013	3:26:50 PM	PH3 MFC set to  0.000000
2/12/2013	3:26:50 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:26:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:26:50 PM	Tube furnace set to 0
2/12/2013	3:27:20 PM	Helium valve closed
2/12/2013	3:27:20 PM	H2 valve closed
2/12/2013	3:27:20 PM	BCl3 valve closed
2/12/2013	3:27:20 PM	PH3 valve closed
2/12/2013	3:27:20 PM	SiCl4 pre valve closed
2/12/2013	3:27:20 PM	SiCl4 post valve closed
2/12/2013	3:27:20 PM	Bypass valve closed
2/12/2013	3:27:20 PM	Bubbler valve closed
2/12/2013	3:27:20 PM	Main Vac valve opened
2/12/2013	3:27:20 PM	Helium MFC set to  0.000000
2/12/2013	3:27:20 PM	H2 MFC set to  0.000000
2/12/2013	3:27:20 PM	BCl3 MFC set to  0.000000
2/12/2013	3:27:20 PM	PH3 MFC set to  0.000000
2/12/2013	3:27:20 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:27:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:27:20 PM	Tube furnace set to 0
2/12/2013	3:27:50 PM	H2 valve closed
2/12/2013	3:27:50 PM	BCl3 valve closed
2/12/2013	3:27:50 PM	PH3 valve closed
2/12/2013	3:27:50 PM	SiCl4 pre valve closed
2/12/2013	3:27:50 PM	SiCl4 post valve closed
2/12/2013	3:27:50 PM	Bypass valve closed
2/12/2013	3:27:50 PM	Bubbler valve closed
2/12/2013	3:27:50 PM	Helium valve opened
2/12/2013	3:27:50 PM	Main Vac valve opened
2/12/2013	3:27:50 PM	Helium MFC set to  20.000000
2/12/2013	3:27:50 PM	H2 MFC set to  0.000000
2/12/2013	3:27:50 PM	BCl3 MFC set to  0.000000
2/12/2013	3:27:50 PM	PH3 MFC set to  0.000000
2/12/2013	3:27:50 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:27:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:27:50 PM	Tube furnace set to 0
2/12/2013	3:28:20 PM	Helium valve closed
2/12/2013	3:28:20 PM	H2 valve closed
2/12/2013	3:28:20 PM	BCl3 valve closed
2/12/2013	3:28:20 PM	PH3 valve closed
2/12/2013	3:28:20 PM	SiCl4 pre valve closed
2/12/2013	3:28:20 PM	SiCl4 post valve closed
2/12/2013	3:28:20 PM	Bypass valve closed
2/12/2013	3:28:20 PM	Bubbler valve closed
2/12/2013	3:28:20 PM	Main Vac valve opened
2/12/2013	3:28:20 PM	Helium MFC set to  0.000000
2/12/2013	3:28:20 PM	H2 MFC set to  0.000000
2/12/2013	3:28:20 PM	BCl3 MFC set to  0.000000
2/12/2013	3:28:20 PM	PH3 MFC set to  0.000000
2/12/2013	3:28:20 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:28:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:28:21 PM	Tube furnace set to 0
2/12/2013	3:28:51 PM	H2 valve closed
2/12/2013	3:28:51 PM	BCl3 valve closed
2/12/2013	3:28:51 PM	PH3 valve closed
2/12/2013	3:28:51 PM	SiCl4 pre valve closed
2/12/2013	3:28:51 PM	SiCl4 post valve closed
2/12/2013	3:28:51 PM	Bypass valve closed
2/12/2013	3:28:51 PM	Bubbler valve closed
2/12/2013	3:28:51 PM	Helium valve opened
2/12/2013	3:28:51 PM	Main Vac valve opened
2/12/2013	3:28:51 PM	Helium MFC set to  20.000000
2/12/2013	3:28:51 PM	H2 MFC set to  0.000000
2/12/2013	3:28:51 PM	BCl3 MFC set to  0.000000
2/12/2013	3:28:51 PM	PH3 MFC set to  0.000000
2/12/2013	3:28:51 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:28:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:28:51 PM	Tube furnace set to 0
2/12/2013	3:29:21 PM	Helium valve closed
2/12/2013	3:29:21 PM	H2 valve closed
2/12/2013	3:29:21 PM	BCl3 valve closed
2/12/2013	3:29:21 PM	PH3 valve closed
2/12/2013	3:29:21 PM	SiCl4 pre valve closed
2/12/2013	3:29:21 PM	SiCl4 post valve closed
2/12/2013	3:29:21 PM	Bypass valve closed
2/12/2013	3:29:21 PM	Bubbler valve closed
2/12/2013	3:29:21 PM	Main Vac valve opened
2/12/2013	3:29:21 PM	Helium MFC set to  0.000000
2/12/2013	3:29:21 PM	H2 MFC set to  0.000000
2/12/2013	3:29:21 PM	BCl3 MFC set to  0.000000
2/12/2013	3:29:21 PM	PH3 MFC set to  0.000000
2/12/2013	3:29:21 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:29:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:29:21 PM	Tube furnace set to 0
2/12/2013	3:29:51 PM	H2 valve closed
2/12/2013	3:29:51 PM	BCl3 valve closed
2/12/2013	3:29:51 PM	PH3 valve closed
2/12/2013	3:29:51 PM	SiCl4 pre valve closed
2/12/2013	3:29:51 PM	SiCl4 post valve closed
2/12/2013	3:29:51 PM	Bypass valve closed
2/12/2013	3:29:51 PM	Bubbler valve closed
2/12/2013	3:29:51 PM	Helium valve opened
2/12/2013	3:29:51 PM	Main Vac valve opened
2/12/2013	3:29:51 PM	Helium MFC set to  20.000000
2/12/2013	3:29:51 PM	H2 MFC set to  0.000000
2/12/2013	3:29:51 PM	BCl3 MFC set to  0.000000
2/12/2013	3:29:51 PM	PH3 MFC set to  0.000000
2/12/2013	3:29:51 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:29:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:29:51 PM	Tube furnace set to 0
2/12/2013	3:30:21 PM	Helium valve closed
2/12/2013	3:30:21 PM	H2 valve closed
2/12/2013	3:30:21 PM	BCl3 valve closed
2/12/2013	3:30:21 PM	PH3 valve closed
2/12/2013	3:30:21 PM	SiCl4 pre valve closed
2/12/2013	3:30:21 PM	SiCl4 post valve closed
2/12/2013	3:30:21 PM	Bypass valve closed
2/12/2013	3:30:21 PM	Bubbler valve closed
2/12/2013	3:30:21 PM	Main Vac valve opened
2/12/2013	3:30:21 PM	Helium MFC set to  0.000000
2/12/2013	3:30:21 PM	H2 MFC set to  0.000000
2/12/2013	3:30:21 PM	BCl3 MFC set to  0.000000
2/12/2013	3:30:21 PM	PH3 MFC set to  0.000000
2/12/2013	3:30:21 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:30:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:30:22 PM	Tube furnace set to 0
2/12/2013	3:30:52 PM	H2 valve closed
2/12/2013	3:30:52 PM	BCl3 valve closed
2/12/2013	3:30:52 PM	PH3 valve closed
2/12/2013	3:30:52 PM	SiCl4 pre valve closed
2/12/2013	3:30:52 PM	SiCl4 post valve closed
2/12/2013	3:30:52 PM	Bypass valve closed
2/12/2013	3:30:52 PM	Bubbler valve closed
2/12/2013	3:30:52 PM	Helium valve opened
2/12/2013	3:30:52 PM	Main Vac valve opened
2/12/2013	3:30:52 PM	Helium MFC set to  20.000000
2/12/2013	3:30:52 PM	H2 MFC set to  0.000000
2/12/2013	3:30:52 PM	BCl3 MFC set to  0.000000
2/12/2013	3:30:52 PM	PH3 MFC set to  0.000000
2/12/2013	3:30:52 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:30:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:30:52 PM	Tube furnace set to 0
2/12/2013	3:31:22 PM	Helium valve closed
2/12/2013	3:31:22 PM	H2 valve closed
2/12/2013	3:31:22 PM	BCl3 valve closed
2/12/2013	3:31:22 PM	PH3 valve closed
2/12/2013	3:31:22 PM	SiCl4 pre valve closed
2/12/2013	3:31:22 PM	SiCl4 post valve closed
2/12/2013	3:31:22 PM	Bypass valve closed
2/12/2013	3:31:22 PM	Bubbler valve closed
2/12/2013	3:31:22 PM	Main Vac valve opened
2/12/2013	3:31:22 PM	Helium MFC set to  0.000000
2/12/2013	3:31:22 PM	H2 MFC set to  0.000000
2/12/2013	3:31:22 PM	BCl3 MFC set to  0.000000
2/12/2013	3:31:22 PM	PH3 MFC set to  0.000000
2/12/2013	3:31:22 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:31:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:31:22 PM	Tube furnace set to 0
2/12/2013	3:31:23 PM	Run finished at 3:31 PM
2/12/2013	3:31:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	3:38:51 PM	Main Vac valve closed
2/12/2013	3:39:04 PM	Main Vac valve opened
2/12/2013	3:41:47 PM	Recipe started at 3:41 PM
2/12/2013	3:41:47 PM	Helium valve closed
2/12/2013	3:41:47 PM	H2 valve closed
2/12/2013	3:41:47 PM	BCl3 valve closed
2/12/2013	3:41:47 PM	SiCl4 pre valve closed
2/12/2013	3:41:47 PM	SiCl4 post valve closed
2/12/2013	3:41:47 PM	Main Vac valve closed
2/12/2013	3:41:47 PM	Bypass valve closed
2/12/2013	3:41:47 PM	Bubbler valve closed
2/12/2013	3:41:47 PM	PH3 valve opened
2/12/2013	3:41:47 PM	Helium MFC set to  0.000000
2/12/2013	3:41:47 PM	H2 MFC set to  0.000000
2/12/2013	3:41:47 PM	BCl3 MFC set to  0.000000
2/12/2013	3:41:47 PM	PH3 MFC set to  0.000000
2/12/2013	3:41:47 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:41:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:41:48 PM	Tube furnace set to 0
2/12/2013	3:41:51 PM	Helium valve closed
2/12/2013	3:41:51 PM	BCl3 valve closed
2/12/2013	3:41:51 PM	PH3 valve closed
2/12/2013	3:41:51 PM	SiCl4 pre valve closed
2/12/2013	3:41:51 PM	SiCl4 post valve closed
2/12/2013	3:41:51 PM	Main Vac valve closed
2/12/2013	3:41:51 PM	Bypass valve closed
2/12/2013	3:41:51 PM	Bubbler valve closed
2/12/2013	3:41:51 PM	H2 valve opened
2/12/2013	3:41:51 PM	Helium MFC set to  0.000000
2/12/2013	3:41:51 PM	H2 MFC set to  500.000000
2/12/2013	3:41:51 PM	BCl3 MFC set to  0.000000
2/12/2013	3:41:51 PM	PH3 MFC set to  0.000000
2/12/2013	3:41:51 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:41:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:41:51 PM	Tube furnace set to 0
2/12/2013	3:43:02 PM	Helium valve closed
2/12/2013	3:43:02 PM	BCl3 valve closed
2/12/2013	3:43:02 PM	PH3 valve closed
2/12/2013	3:43:02 PM	SiCl4 pre valve closed
2/12/2013	3:43:02 PM	SiCl4 post valve closed
2/12/2013	3:43:02 PM	Main Vac valve closed
2/12/2013	3:43:02 PM	Bypass valve closed
2/12/2013	3:43:02 PM	H2 valve opened
2/12/2013	3:43:02 PM	Bubbler valve opened
2/12/2013	3:43:02 PM	Helium MFC set to  0.000000
2/12/2013	3:43:02 PM	H2 MFC set to  500.000000
2/12/2013	3:43:02 PM	BCl3 MFC set to  0.000000
2/12/2013	3:43:02 PM	PH3 MFC set to  0.000000
2/12/2013	3:43:02 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:43:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:43:02 PM	Tube furnace set to 0
2/12/2013	3:43:03 PM	Helium valve closed
2/12/2013	3:43:03 PM	BCl3 valve closed
2/12/2013	3:43:03 PM	PH3 valve closed
2/12/2013	3:43:03 PM	SiCl4 pre valve closed
2/12/2013	3:43:03 PM	SiCl4 post valve closed
2/12/2013	3:43:03 PM	Main Vac valve closed
2/12/2013	3:43:03 PM	Bypass valve closed
2/12/2013	3:43:03 PM	H2 valve opened
2/12/2013	3:43:03 PM	Bubbler valve opened
2/12/2013	3:43:03 PM	Helium MFC set to  0.000000
2/12/2013	3:43:03 PM	H2 MFC set to  500.000000
2/12/2013	3:43:03 PM	BCl3 MFC set to  0.000000
2/12/2013	3:43:03 PM	PH3 MFC set to  0.000000
2/12/2013	3:43:03 PM	SiCl4 MFC set to  0.000000
2/12/2013	3:43:03 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	3:43:04 PM	Tube furnace set to 1000
2/12/2013	4:03:04 PM	Helium valve closed
2/12/2013	4:03:04 PM	BCl3 valve closed
2/12/2013	4:03:04 PM	Main Vac valve closed
2/12/2013	4:03:04 PM	Bypass valve closed
2/12/2013	4:03:04 PM	H2 valve opened
2/12/2013	4:03:04 PM	PH3 valve opened
2/12/2013	4:03:04 PM	SiCl4 pre valve opened
2/12/2013	4:03:04 PM	SiCl4 post valve opened
2/12/2013	4:03:04 PM	Bubbler valve opened
2/12/2013	4:03:04 PM	Helium MFC set to  0.000000
2/12/2013	4:03:04 PM	H2 MFC set to  450.000000
2/12/2013	4:03:04 PM	BCl3 MFC set to  0.000000
2/12/2013	4:03:04 PM	PH3 MFC set to  1.300000
2/12/2013	4:03:04 PM	SiCl4 MFC set to  50.000000
2/12/2013	4:03:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:03:04 PM	Tube furnace set to 1000
2/12/2013	4:15:04 PM	Helium valve closed
2/12/2013	4:15:04 PM	BCl3 valve closed
2/12/2013	4:15:04 PM	PH3 valve closed
2/12/2013	4:15:04 PM	SiCl4 pre valve closed
2/12/2013	4:15:04 PM	SiCl4 post valve closed
2/12/2013	4:15:04 PM	Main Vac valve closed
2/12/2013	4:15:04 PM	Bypass valve closed
2/12/2013	4:15:04 PM	H2 valve opened
2/12/2013	4:15:04 PM	Bubbler valve opened
2/12/2013	4:15:04 PM	Helium MFC set to  0.000000
2/12/2013	4:15:04 PM	H2 MFC set to  500.000000
2/12/2013	4:15:04 PM	BCl3 MFC set to  0.000000
2/12/2013	4:15:04 PM	PH3 MFC set to  0.000000
2/12/2013	4:15:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:15:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:15:04 PM	Tube furnace set to 900
2/12/2013	4:20:04 PM	Helium valve closed
2/12/2013	4:20:04 PM	BCl3 valve closed
2/12/2013	4:20:04 PM	PH3 valve closed
2/12/2013	4:20:04 PM	SiCl4 pre valve closed
2/12/2013	4:20:04 PM	SiCl4 post valve closed
2/12/2013	4:20:04 PM	Main Vac valve closed
2/12/2013	4:20:04 PM	Bypass valve closed
2/12/2013	4:20:04 PM	H2 valve opened
2/12/2013	4:20:04 PM	Bubbler valve opened
2/12/2013	4:20:04 PM	Helium MFC set to  0.000000
2/12/2013	4:20:04 PM	H2 MFC set to  500.000000
2/12/2013	4:20:04 PM	BCl3 MFC set to  0.000000
2/12/2013	4:20:04 PM	PH3 MFC set to  0.000000
2/12/2013	4:20:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:20:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:20:04 PM	Tube furnace set to 800
2/12/2013	4:25:04 PM	Helium valve closed
2/12/2013	4:25:04 PM	BCl3 valve closed
2/12/2013	4:25:04 PM	PH3 valve closed
2/12/2013	4:25:04 PM	SiCl4 pre valve closed
2/12/2013	4:25:04 PM	SiCl4 post valve closed
2/12/2013	4:25:04 PM	Main Vac valve closed
2/12/2013	4:25:04 PM	Bypass valve closed
2/12/2013	4:25:04 PM	H2 valve opened
2/12/2013	4:25:04 PM	Bubbler valve opened
2/12/2013	4:25:04 PM	Helium MFC set to  0.000000
2/12/2013	4:25:04 PM	H2 MFC set to  500.000000
2/12/2013	4:25:04 PM	BCl3 MFC set to  0.000000
2/12/2013	4:25:04 PM	PH3 MFC set to  0.000000
2/12/2013	4:25:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:25:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:25:04 PM	Tube furnace set to 700
2/12/2013	4:30:04 PM	Helium valve closed
2/12/2013	4:30:04 PM	BCl3 valve closed
2/12/2013	4:30:04 PM	PH3 valve closed
2/12/2013	4:30:04 PM	SiCl4 pre valve closed
2/12/2013	4:30:04 PM	SiCl4 post valve closed
2/12/2013	4:30:04 PM	Main Vac valve closed
2/12/2013	4:30:04 PM	Bypass valve closed
2/12/2013	4:30:04 PM	H2 valve opened
2/12/2013	4:30:04 PM	Bubbler valve opened
2/12/2013	4:30:04 PM	Helium MFC set to  0.000000
2/12/2013	4:30:04 PM	H2 MFC set to  500.000000
2/12/2013	4:30:04 PM	BCl3 MFC set to  0.000000
2/12/2013	4:30:04 PM	PH3 MFC set to  0.000000
2/12/2013	4:30:04 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:30:04 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:30:05 PM	Tube furnace set to 600
2/12/2013	4:35:05 PM	H2 valve closed
2/12/2013	4:35:05 PM	BCl3 valve closed
2/12/2013	4:35:05 PM	PH3 valve closed
2/12/2013	4:35:05 PM	SiCl4 pre valve closed
2/12/2013	4:35:05 PM	SiCl4 post valve closed
2/12/2013	4:35:05 PM	Main Vac valve closed
2/12/2013	4:35:05 PM	Bypass valve closed
2/12/2013	4:35:05 PM	Helium valve opened
2/12/2013	4:35:05 PM	Bubbler valve opened
2/12/2013	4:35:05 PM	Helium MFC set to  500.000000
2/12/2013	4:35:05 PM	H2 MFC set to  0.000000
2/12/2013	4:35:05 PM	BCl3 MFC set to  0.000000
2/12/2013	4:35:05 PM	PH3 MFC set to  0.000000
2/12/2013	4:35:05 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:35:05 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:35:05 PM	Tube furnace set to 0
2/12/2013	4:55:05 PM	Helium valve closed
2/12/2013	4:55:05 PM	H2 valve closed
2/12/2013	4:55:05 PM	BCl3 valve closed
2/12/2013	4:55:05 PM	PH3 valve closed
2/12/2013	4:55:05 PM	SiCl4 pre valve closed
2/12/2013	4:55:05 PM	SiCl4 post valve closed
2/12/2013	4:55:05 PM	Main Vac valve closed
2/12/2013	4:55:05 PM	Bypass valve closed
2/12/2013	4:55:05 PM	Bubbler valve closed
2/12/2013	4:55:05 PM	Helium MFC set to  0.000000
2/12/2013	4:55:05 PM	H2 MFC set to  0.000000
2/12/2013	4:55:05 PM	BCl3 MFC set to  0.000000
2/12/2013	4:55:05 PM	PH3 MFC set to  0.000000
2/12/2013	4:55:05 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:55:05 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:55:05 PM	Tube furnace set to 0
2/12/2013	4:55:06 PM	Run finished at 4:55 PM
2/12/2013	4:55:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	4:55:56 PM	Recipe started at 4:55 PM
2/12/2013	4:55:56 PM	Helium valve closed
2/12/2013	4:55:56 PM	H2 valve closed
2/12/2013	4:55:56 PM	BCl3 valve closed
2/12/2013	4:55:56 PM	PH3 valve closed
2/12/2013	4:55:56 PM	SiCl4 pre valve closed
2/12/2013	4:55:56 PM	SiCl4 post valve closed
2/12/2013	4:55:56 PM	Main Vac valve closed
2/12/2013	4:55:56 PM	Bypass valve closed
2/12/2013	4:55:56 PM	Bubbler valve closed
2/12/2013	4:55:56 PM	Helium MFC set to  0.000000
2/12/2013	4:55:56 PM	H2 MFC set to  0.000000
2/12/2013	4:55:56 PM	BCl3 MFC set to  0.000000
2/12/2013	4:55:56 PM	PH3 MFC set to  0.000000
2/12/2013	4:55:56 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:55:56 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:55:56 PM	Tube furnace set to 0
2/12/2013	4:55:59 PM	H2 valve closed
2/12/2013	4:55:59 PM	BCl3 valve closed
2/12/2013	4:55:59 PM	PH3 valve closed
2/12/2013	4:55:59 PM	SiCl4 pre valve closed
2/12/2013	4:55:59 PM	SiCl4 post valve closed
2/12/2013	4:55:59 PM	Main Vac valve closed
2/12/2013	4:55:59 PM	Bypass valve closed
2/12/2013	4:55:59 PM	Bubbler valve closed
2/12/2013	4:55:59 PM	Helium valve opened
2/12/2013	4:55:59 PM	Helium MFC set to  500.000000
2/12/2013	4:55:59 PM	H2 MFC set to  0.000000
2/12/2013	4:55:59 PM	BCl3 MFC set to  0.000000
2/12/2013	4:55:59 PM	PH3 MFC set to  0.000000
2/12/2013	4:55:59 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:55:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:55:59 PM	Tube furnace set to 0
2/12/2013	4:55:59 PM	Helium valve closed
2/12/2013	4:55:59 PM	H2 valve closed
2/12/2013	4:55:59 PM	BCl3 valve closed
2/12/2013	4:55:59 PM	PH3 valve closed
2/12/2013	4:55:59 PM	SiCl4 pre valve closed
2/12/2013	4:55:59 PM	SiCl4 post valve closed
2/12/2013	4:55:59 PM	Main Vac valve closed
2/12/2013	4:55:59 PM	Bypass valve closed
2/12/2013	4:55:59 PM	Bubbler valve closed
2/12/2013	4:55:59 PM	Helium MFC set to  0.000000
2/12/2013	4:55:59 PM	H2 MFC set to  0.000000
2/12/2013	4:55:59 PM	BCl3 MFC set to  0.000000
2/12/2013	4:55:59 PM	PH3 MFC set to  0.000000
2/12/2013	4:55:59 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:55:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:56:00 PM	Tube furnace set to 0
2/12/2013	4:56:01 PM	Run finished at 4:56 PM
2/12/2013	4:56:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2013	4:59:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	4:59:15 PM	Recipe started at 4:59 PM
2/12/2013	4:59:15 PM	Helium valve closed
2/12/2013	4:59:15 PM	H2 valve closed
2/12/2013	4:59:15 PM	BCl3 valve closed
2/12/2013	4:59:15 PM	PH3 valve closed
2/12/2013	4:59:15 PM	SiCl4 pre valve closed
2/12/2013	4:59:15 PM	SiCl4 post valve closed
2/12/2013	4:59:15 PM	Main Vac valve closed
2/12/2013	4:59:15 PM	Bubbler valve closed
2/12/2013	4:59:15 PM	Bypass valve opened
2/12/2013	4:59:15 PM	Helium MFC set to  0.000000
2/12/2013	4:59:15 PM	H2 MFC set to  0.000000
2/12/2013	4:59:15 PM	BCl3 MFC set to  0.000000
2/12/2013	4:59:15 PM	PH3 MFC set to  0.000000
2/12/2013	4:59:15 PM	SiCl4 MFC set to  0.000000
2/12/2013	4:59:15 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	4:59:15 PM	Tube furnace set to 0
2/12/2013	5:00:25 PM	Helium valve closed
2/12/2013	5:00:25 PM	H2 valve closed
2/12/2013	5:00:25 PM	BCl3 valve closed
2/12/2013	5:00:25 PM	PH3 valve closed
2/12/2013	5:00:25 PM	SiCl4 pre valve closed
2/12/2013	5:00:25 PM	SiCl4 post valve closed
2/12/2013	5:00:25 PM	Main Vac valve closed
2/12/2013	5:00:25 PM	Bubbler valve closed
2/12/2013	5:00:25 PM	Bypass valve opened
2/12/2013	5:00:25 PM	Helium MFC set to  0.000000
2/12/2013	5:00:25 PM	H2 MFC set to  0.000000
2/12/2013	5:00:25 PM	BCl3 MFC set to  0.000000
2/12/2013	5:00:25 PM	PH3 MFC set to  0.000000
2/12/2013	5:00:25 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:00:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:00:25 PM	Tube furnace set to 0
2/12/2013	5:01:25 PM	Helium valve closed
2/12/2013	5:01:25 PM	H2 valve closed
2/12/2013	5:01:25 PM	BCl3 valve closed
2/12/2013	5:01:25 PM	PH3 valve closed
2/12/2013	5:01:25 PM	SiCl4 pre valve closed
2/12/2013	5:01:25 PM	SiCl4 post valve closed
2/12/2013	5:01:25 PM	Bypass valve closed
2/12/2013	5:01:25 PM	Bubbler valve closed
2/12/2013	5:01:25 PM	Main Vac valve opened
2/12/2013	5:01:25 PM	Helium MFC set to  0.000000
2/12/2013	5:01:25 PM	H2 MFC set to  0.000000
2/12/2013	5:01:25 PM	BCl3 MFC set to  0.000000
2/12/2013	5:01:25 PM	PH3 MFC set to  0.000000
2/12/2013	5:01:25 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:01:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:01:25 PM	Tube furnace set to 0
2/12/2013	5:01:26 PM	Run finished at 5:01 PM
2/12/2013	5:01:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2013	5:01:33 PM	Tube furnace set to 200
2/12/2013	5:07:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	5:07:44 PM	Recipe started at 5:07 PM
2/12/2013	5:07:44 PM	Helium valve closed
2/12/2013	5:07:44 PM	H2 valve closed
2/12/2013	5:07:44 PM	BCl3 valve closed
2/12/2013	5:07:44 PM	PH3 valve closed
2/12/2013	5:07:44 PM	SiCl4 pre valve closed
2/12/2013	5:07:44 PM	SiCl4 post valve closed
2/12/2013	5:07:44 PM	Main Vac valve closed
2/12/2013	5:07:44 PM	Bubbler valve closed
2/12/2013	5:07:44 PM	Bypass valve opened
2/12/2013	5:07:44 PM	Helium MFC set to  0.000000
2/12/2013	5:07:44 PM	H2 MFC set to  0.000000
2/12/2013	5:07:44 PM	BCl3 MFC set to  0.000000
2/12/2013	5:07:44 PM	PH3 MFC set to  0.000000
2/12/2013	5:07:44 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:07:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:07:45 PM	Tube furnace set to 0
2/12/2013	5:07:45 PM	Helium valve closed
2/12/2013	5:07:45 PM	H2 valve closed
2/12/2013	5:07:45 PM	BCl3 valve closed
2/12/2013	5:07:45 PM	PH3 valve closed
2/12/2013	5:07:45 PM	SiCl4 pre valve closed
2/12/2013	5:07:45 PM	SiCl4 post valve closed
2/12/2013	5:07:45 PM	Main Vac valve closed
2/12/2013	5:07:45 PM	Bubbler valve closed
2/12/2013	5:07:45 PM	Bypass valve opened
2/12/2013	5:07:45 PM	Helium MFC set to  0.000000
2/12/2013	5:07:45 PM	H2 MFC set to  0.000000
2/12/2013	5:07:45 PM	BCl3 MFC set to  0.000000
2/12/2013	5:07:45 PM	PH3 MFC set to  0.000000
2/12/2013	5:07:45 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:07:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:07:45 PM	Tube furnace set to 0
2/12/2013	5:08:15 PM	Helium valve closed
2/12/2013	5:08:15 PM	H2 valve closed
2/12/2013	5:08:15 PM	BCl3 valve closed
2/12/2013	5:08:15 PM	PH3 valve closed
2/12/2013	5:08:15 PM	SiCl4 pre valve closed
2/12/2013	5:08:15 PM	SiCl4 post valve closed
2/12/2013	5:08:15 PM	Bypass valve closed
2/12/2013	5:08:15 PM	Bubbler valve closed
2/12/2013	5:08:15 PM	Main Vac valve opened
2/12/2013	5:08:15 PM	Helium MFC set to  0.000000
2/12/2013	5:08:15 PM	H2 MFC set to  0.000000
2/12/2013	5:08:15 PM	BCl3 MFC set to  0.000000
2/12/2013	5:08:15 PM	PH3 MFC set to  0.000000
2/12/2013	5:08:15 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:08:15 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:08:15 PM	Tube furnace set to 0
2/12/2013	5:08:45 PM	H2 valve closed
2/12/2013	5:08:45 PM	BCl3 valve closed
2/12/2013	5:08:45 PM	PH3 valve closed
2/12/2013	5:08:45 PM	SiCl4 pre valve closed
2/12/2013	5:08:45 PM	SiCl4 post valve closed
2/12/2013	5:08:45 PM	Bypass valve closed
2/12/2013	5:08:45 PM	Bubbler valve closed
2/12/2013	5:08:45 PM	Helium valve opened
2/12/2013	5:08:45 PM	Main Vac valve opened
2/12/2013	5:08:45 PM	Helium MFC set to  20.000000
2/12/2013	5:08:45 PM	H2 MFC set to  0.000000
2/12/2013	5:08:45 PM	BCl3 MFC set to  0.000000
2/12/2013	5:08:45 PM	PH3 MFC set to  0.000000
2/12/2013	5:08:45 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:08:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:08:46 PM	Tube furnace set to 0
2/12/2013	5:09:16 PM	Helium valve closed
2/12/2013	5:09:16 PM	H2 valve closed
2/12/2013	5:09:16 PM	BCl3 valve closed
2/12/2013	5:09:16 PM	PH3 valve closed
2/12/2013	5:09:16 PM	SiCl4 pre valve closed
2/12/2013	5:09:16 PM	SiCl4 post valve closed
2/12/2013	5:09:16 PM	Bypass valve closed
2/12/2013	5:09:16 PM	Bubbler valve closed
2/12/2013	5:09:16 PM	Main Vac valve opened
2/12/2013	5:09:16 PM	Helium MFC set to  0.000000
2/12/2013	5:09:16 PM	H2 MFC set to  0.000000
2/12/2013	5:09:16 PM	BCl3 MFC set to  0.000000
2/12/2013	5:09:16 PM	PH3 MFC set to  0.000000
2/12/2013	5:09:16 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:09:16 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:09:16 PM	Tube furnace set to 0
2/12/2013	5:09:46 PM	H2 valve closed
2/12/2013	5:09:46 PM	BCl3 valve closed
2/12/2013	5:09:46 PM	PH3 valve closed
2/12/2013	5:09:46 PM	SiCl4 pre valve closed
2/12/2013	5:09:46 PM	SiCl4 post valve closed
2/12/2013	5:09:46 PM	Bypass valve closed
2/12/2013	5:09:46 PM	Bubbler valve closed
2/12/2013	5:09:46 PM	Helium valve opened
2/12/2013	5:09:46 PM	Main Vac valve opened
2/12/2013	5:09:46 PM	Helium MFC set to  20.000000
2/12/2013	5:09:46 PM	H2 MFC set to  0.000000
2/12/2013	5:09:46 PM	BCl3 MFC set to  0.000000
2/12/2013	5:09:46 PM	PH3 MFC set to  0.000000
2/12/2013	5:09:46 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:09:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:09:46 PM	Tube furnace set to 0
2/12/2013	5:10:16 PM	Helium valve closed
2/12/2013	5:10:16 PM	H2 valve closed
2/12/2013	5:10:16 PM	BCl3 valve closed
2/12/2013	5:10:16 PM	PH3 valve closed
2/12/2013	5:10:16 PM	SiCl4 pre valve closed
2/12/2013	5:10:16 PM	SiCl4 post valve closed
2/12/2013	5:10:16 PM	Bypass valve closed
2/12/2013	5:10:16 PM	Bubbler valve closed
2/12/2013	5:10:16 PM	Main Vac valve opened
2/12/2013	5:10:16 PM	Helium MFC set to  0.000000
2/12/2013	5:10:16 PM	H2 MFC set to  0.000000
2/12/2013	5:10:16 PM	BCl3 MFC set to  0.000000
2/12/2013	5:10:16 PM	PH3 MFC set to  0.000000
2/12/2013	5:10:16 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:10:16 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:10:16 PM	Tube furnace set to 0
2/12/2013	5:10:46 PM	H2 valve closed
2/12/2013	5:10:46 PM	BCl3 valve closed
2/12/2013	5:10:46 PM	PH3 valve closed
2/12/2013	5:10:46 PM	SiCl4 pre valve closed
2/12/2013	5:10:46 PM	SiCl4 post valve closed
2/12/2013	5:10:46 PM	Bypass valve closed
2/12/2013	5:10:46 PM	Bubbler valve closed
2/12/2013	5:10:46 PM	Helium valve opened
2/12/2013	5:10:46 PM	Main Vac valve opened
2/12/2013	5:10:46 PM	Helium MFC set to  20.000000
2/12/2013	5:10:46 PM	H2 MFC set to  0.000000
2/12/2013	5:10:46 PM	BCl3 MFC set to  0.000000
2/12/2013	5:10:46 PM	PH3 MFC set to  0.000000
2/12/2013	5:10:46 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:10:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:10:47 PM	Tube furnace set to 0
2/12/2013	5:11:17 PM	Helium valve closed
2/12/2013	5:11:17 PM	H2 valve closed
2/12/2013	5:11:17 PM	BCl3 valve closed
2/12/2013	5:11:17 PM	PH3 valve closed
2/12/2013	5:11:17 PM	SiCl4 pre valve closed
2/12/2013	5:11:17 PM	SiCl4 post valve closed
2/12/2013	5:11:17 PM	Bypass valve closed
2/12/2013	5:11:17 PM	Bubbler valve closed
2/12/2013	5:11:17 PM	Main Vac valve opened
2/12/2013	5:11:17 PM	Helium MFC set to  0.000000
2/12/2013	5:11:17 PM	H2 MFC set to  0.000000
2/12/2013	5:11:17 PM	BCl3 MFC set to  0.000000
2/12/2013	5:11:17 PM	PH3 MFC set to  0.000000
2/12/2013	5:11:17 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:11:17 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:11:17 PM	Tube furnace set to 0
2/12/2013	5:11:47 PM	H2 valve closed
2/12/2013	5:11:47 PM	BCl3 valve closed
2/12/2013	5:11:47 PM	PH3 valve closed
2/12/2013	5:11:47 PM	SiCl4 pre valve closed
2/12/2013	5:11:47 PM	SiCl4 post valve closed
2/12/2013	5:11:47 PM	Bypass valve closed
2/12/2013	5:11:47 PM	Bubbler valve closed
2/12/2013	5:11:47 PM	Helium valve opened
2/12/2013	5:11:47 PM	Main Vac valve opened
2/12/2013	5:11:47 PM	Helium MFC set to  20.000000
2/12/2013	5:11:47 PM	H2 MFC set to  0.000000
2/12/2013	5:11:47 PM	BCl3 MFC set to  0.000000
2/12/2013	5:11:47 PM	PH3 MFC set to  0.000000
2/12/2013	5:11:47 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:11:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:11:47 PM	Tube furnace set to 0
2/12/2013	5:12:17 PM	Helium valve closed
2/12/2013	5:12:17 PM	H2 valve closed
2/12/2013	5:12:17 PM	BCl3 valve closed
2/12/2013	5:12:17 PM	PH3 valve closed
2/12/2013	5:12:17 PM	SiCl4 pre valve closed
2/12/2013	5:12:17 PM	SiCl4 post valve closed
2/12/2013	5:12:17 PM	Bypass valve closed
2/12/2013	5:12:17 PM	Bubbler valve closed
2/12/2013	5:12:17 PM	Main Vac valve opened
2/12/2013	5:12:17 PM	Helium MFC set to  0.000000
2/12/2013	5:12:17 PM	H2 MFC set to  0.000000
2/12/2013	5:12:17 PM	BCl3 MFC set to  0.000000
2/12/2013	5:12:17 PM	PH3 MFC set to  0.000000
2/12/2013	5:12:17 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:12:17 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:12:17 PM	Tube furnace set to 0
2/12/2013	5:12:47 PM	H2 valve closed
2/12/2013	5:12:47 PM	BCl3 valve closed
2/12/2013	5:12:47 PM	PH3 valve closed
2/12/2013	5:12:47 PM	SiCl4 pre valve closed
2/12/2013	5:12:47 PM	SiCl4 post valve closed
2/12/2013	5:12:47 PM	Bypass valve closed
2/12/2013	5:12:47 PM	Bubbler valve closed
2/12/2013	5:12:47 PM	Helium valve opened
2/12/2013	5:12:47 PM	Main Vac valve opened
2/12/2013	5:12:47 PM	Helium MFC set to  20.000000
2/12/2013	5:12:47 PM	H2 MFC set to  0.000000
2/12/2013	5:12:47 PM	BCl3 MFC set to  0.000000
2/12/2013	5:12:47 PM	PH3 MFC set to  0.000000
2/12/2013	5:12:47 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:12:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:12:48 PM	Tube furnace set to 0
2/12/2013	5:13:18 PM	Helium valve closed
2/12/2013	5:13:18 PM	H2 valve closed
2/12/2013	5:13:18 PM	BCl3 valve closed
2/12/2013	5:13:18 PM	PH3 valve closed
2/12/2013	5:13:18 PM	SiCl4 pre valve closed
2/12/2013	5:13:18 PM	SiCl4 post valve closed
2/12/2013	5:13:18 PM	Bypass valve closed
2/12/2013	5:13:18 PM	Bubbler valve closed
2/12/2013	5:13:18 PM	Main Vac valve opened
2/12/2013	5:13:18 PM	Helium MFC set to  0.000000
2/12/2013	5:13:18 PM	H2 MFC set to  0.000000
2/12/2013	5:13:18 PM	BCl3 MFC set to  0.000000
2/12/2013	5:13:18 PM	PH3 MFC set to  0.000000
2/12/2013	5:13:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:13:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:13:18 PM	Tube furnace set to 0
2/12/2013	5:13:48 PM	H2 valve closed
2/12/2013	5:13:48 PM	BCl3 valve closed
2/12/2013	5:13:48 PM	PH3 valve closed
2/12/2013	5:13:48 PM	SiCl4 pre valve closed
2/12/2013	5:13:48 PM	SiCl4 post valve closed
2/12/2013	5:13:48 PM	Bypass valve closed
2/12/2013	5:13:48 PM	Bubbler valve closed
2/12/2013	5:13:48 PM	Helium valve opened
2/12/2013	5:13:48 PM	Main Vac valve opened
2/12/2013	5:13:48 PM	Helium MFC set to  20.000000
2/12/2013	5:13:48 PM	H2 MFC set to  0.000000
2/12/2013	5:13:48 PM	BCl3 MFC set to  0.000000
2/12/2013	5:13:48 PM	PH3 MFC set to  0.000000
2/12/2013	5:13:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:13:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:13:48 PM	Tube furnace set to 0
2/12/2013	5:14:18 PM	Helium valve closed
2/12/2013	5:14:18 PM	H2 valve closed
2/12/2013	5:14:18 PM	BCl3 valve closed
2/12/2013	5:14:18 PM	PH3 valve closed
2/12/2013	5:14:18 PM	SiCl4 pre valve closed
2/12/2013	5:14:18 PM	SiCl4 post valve closed
2/12/2013	5:14:18 PM	Bypass valve closed
2/12/2013	5:14:18 PM	Bubbler valve closed
2/12/2013	5:14:18 PM	Main Vac valve opened
2/12/2013	5:14:18 PM	Helium MFC set to  0.000000
2/12/2013	5:14:18 PM	H2 MFC set to  0.000000
2/12/2013	5:14:18 PM	BCl3 MFC set to  0.000000
2/12/2013	5:14:18 PM	PH3 MFC set to  0.000000
2/12/2013	5:14:18 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:14:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:14:18 PM	Tube furnace set to 0
2/12/2013	5:14:48 PM	H2 valve closed
2/12/2013	5:14:48 PM	BCl3 valve closed
2/12/2013	5:14:48 PM	PH3 valve closed
2/12/2013	5:14:48 PM	SiCl4 pre valve closed
2/12/2013	5:14:48 PM	SiCl4 post valve closed
2/12/2013	5:14:48 PM	Bypass valve closed
2/12/2013	5:14:48 PM	Bubbler valve closed
2/12/2013	5:14:48 PM	Helium valve opened
2/12/2013	5:14:48 PM	Main Vac valve opened
2/12/2013	5:14:48 PM	Helium MFC set to  20.000000
2/12/2013	5:14:48 PM	H2 MFC set to  0.000000
2/12/2013	5:14:48 PM	BCl3 MFC set to  0.000000
2/12/2013	5:14:48 PM	PH3 MFC set to  0.000000
2/12/2013	5:14:48 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:14:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:14:49 PM	Tube furnace set to 0
2/12/2013	5:15:19 PM	Helium valve closed
2/12/2013	5:15:19 PM	H2 valve closed
2/12/2013	5:15:19 PM	BCl3 valve closed
2/12/2013	5:15:19 PM	PH3 valve closed
2/12/2013	5:15:19 PM	SiCl4 pre valve closed
2/12/2013	5:15:19 PM	SiCl4 post valve closed
2/12/2013	5:15:19 PM	Bypass valve closed
2/12/2013	5:15:19 PM	Bubbler valve closed
2/12/2013	5:15:19 PM	Main Vac valve opened
2/12/2013	5:15:19 PM	Helium MFC set to  0.000000
2/12/2013	5:15:19 PM	H2 MFC set to  0.000000
2/12/2013	5:15:19 PM	BCl3 MFC set to  0.000000
2/12/2013	5:15:19 PM	PH3 MFC set to  0.000000
2/12/2013	5:15:19 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:15:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:15:19 PM	Tube furnace set to 0
2/12/2013	5:15:49 PM	H2 valve closed
2/12/2013	5:15:49 PM	BCl3 valve closed
2/12/2013	5:15:49 PM	PH3 valve closed
2/12/2013	5:15:49 PM	SiCl4 pre valve closed
2/12/2013	5:15:49 PM	SiCl4 post valve closed
2/12/2013	5:15:49 PM	Bypass valve closed
2/12/2013	5:15:49 PM	Bubbler valve closed
2/12/2013	5:15:49 PM	Helium valve opened
2/12/2013	5:15:49 PM	Main Vac valve opened
2/12/2013	5:15:49 PM	Helium MFC set to  20.000000
2/12/2013	5:15:49 PM	H2 MFC set to  0.000000
2/12/2013	5:15:49 PM	BCl3 MFC set to  0.000000
2/12/2013	5:15:49 PM	PH3 MFC set to  0.000000
2/12/2013	5:15:49 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:15:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:15:49 PM	Tube furnace set to 0
2/12/2013	5:16:19 PM	Helium valve closed
2/12/2013	5:16:19 PM	H2 valve closed
2/12/2013	5:16:19 PM	BCl3 valve closed
2/12/2013	5:16:19 PM	PH3 valve closed
2/12/2013	5:16:19 PM	SiCl4 pre valve closed
2/12/2013	5:16:19 PM	SiCl4 post valve closed
2/12/2013	5:16:19 PM	Bypass valve closed
2/12/2013	5:16:19 PM	Bubbler valve closed
2/12/2013	5:16:19 PM	Main Vac valve opened
2/12/2013	5:16:19 PM	Helium MFC set to  0.000000
2/12/2013	5:16:19 PM	H2 MFC set to  0.000000
2/12/2013	5:16:19 PM	BCl3 MFC set to  0.000000
2/12/2013	5:16:19 PM	PH3 MFC set to  0.000000
2/12/2013	5:16:19 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:16:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:16:19 PM	Tube furnace set to 0
2/12/2013	5:16:49 PM	H2 valve closed
2/12/2013	5:16:49 PM	BCl3 valve closed
2/12/2013	5:16:49 PM	PH3 valve closed
2/12/2013	5:16:49 PM	SiCl4 pre valve closed
2/12/2013	5:16:49 PM	SiCl4 post valve closed
2/12/2013	5:16:49 PM	Bypass valve closed
2/12/2013	5:16:49 PM	Bubbler valve closed
2/12/2013	5:16:49 PM	Helium valve opened
2/12/2013	5:16:49 PM	Main Vac valve opened
2/12/2013	5:16:49 PM	Helium MFC set to  20.000000
2/12/2013	5:16:49 PM	H2 MFC set to  0.000000
2/12/2013	5:16:49 PM	BCl3 MFC set to  0.000000
2/12/2013	5:16:49 PM	PH3 MFC set to  0.000000
2/12/2013	5:16:49 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:16:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:16:50 PM	Tube furnace set to 0
2/12/2013	5:17:20 PM	Helium valve closed
2/12/2013	5:17:20 PM	H2 valve closed
2/12/2013	5:17:20 PM	BCl3 valve closed
2/12/2013	5:17:20 PM	PH3 valve closed
2/12/2013	5:17:20 PM	SiCl4 pre valve closed
2/12/2013	5:17:20 PM	SiCl4 post valve closed
2/12/2013	5:17:20 PM	Bypass valve closed
2/12/2013	5:17:20 PM	Bubbler valve closed
2/12/2013	5:17:20 PM	Main Vac valve opened
2/12/2013	5:17:20 PM	Helium MFC set to  0.000000
2/12/2013	5:17:20 PM	H2 MFC set to  0.000000
2/12/2013	5:17:20 PM	BCl3 MFC set to  0.000000
2/12/2013	5:17:20 PM	PH3 MFC set to  0.000000
2/12/2013	5:17:20 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:17:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:17:20 PM	Tube furnace set to 0
2/12/2013	5:17:50 PM	H2 valve closed
2/12/2013	5:17:50 PM	BCl3 valve closed
2/12/2013	5:17:50 PM	PH3 valve closed
2/12/2013	5:17:50 PM	SiCl4 pre valve closed
2/12/2013	5:17:50 PM	SiCl4 post valve closed
2/12/2013	5:17:50 PM	Bypass valve closed
2/12/2013	5:17:50 PM	Bubbler valve closed
2/12/2013	5:17:50 PM	Helium valve opened
2/12/2013	5:17:50 PM	Main Vac valve opened
2/12/2013	5:17:50 PM	Helium MFC set to  20.000000
2/12/2013	5:17:50 PM	H2 MFC set to  0.000000
2/12/2013	5:17:50 PM	BCl3 MFC set to  0.000000
2/12/2013	5:17:50 PM	PH3 MFC set to  0.000000
2/12/2013	5:17:50 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:17:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:17:50 PM	Tube furnace set to 0
2/12/2013	5:18:20 PM	Helium valve closed
2/12/2013	5:18:20 PM	H2 valve closed
2/12/2013	5:18:20 PM	BCl3 valve closed
2/12/2013	5:18:20 PM	PH3 valve closed
2/12/2013	5:18:20 PM	SiCl4 pre valve closed
2/12/2013	5:18:20 PM	SiCl4 post valve closed
2/12/2013	5:18:20 PM	Bypass valve closed
2/12/2013	5:18:20 PM	Bubbler valve closed
2/12/2013	5:18:20 PM	Main Vac valve opened
2/12/2013	5:18:20 PM	Helium MFC set to  0.000000
2/12/2013	5:18:20 PM	H2 MFC set to  0.000000
2/12/2013	5:18:20 PM	BCl3 MFC set to  0.000000
2/12/2013	5:18:20 PM	PH3 MFC set to  0.000000
2/12/2013	5:18:20 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:18:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:18:20 PM	Tube furnace set to 0
2/12/2013	5:18:21 PM	Run finished at 5:18 PM
2/12/2013	5:18:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/12/2013	5:27:07 PM	Recipe started at 5:27 PM
2/12/2013	5:27:07 PM	Helium valve closed
2/12/2013	5:27:07 PM	H2 valve closed
2/12/2013	5:27:07 PM	BCl3 valve closed
2/12/2013	5:27:07 PM	PH3 valve closed
2/12/2013	5:27:07 PM	SiCl4 pre valve closed
2/12/2013	5:27:07 PM	SiCl4 post valve closed
2/12/2013	5:27:07 PM	Bypass valve closed
2/12/2013	5:27:07 PM	Bubbler valve closed
2/12/2013	5:27:07 PM	Main Vac valve opened
2/12/2013	5:27:07 PM	Helium MFC set to  0.000000
2/12/2013	5:27:07 PM	H2 MFC set to  0.000000
2/12/2013	5:27:07 PM	BCl3 MFC set to  0.000000
2/12/2013	5:27:07 PM	PH3 MFC set to  0.000000
2/12/2013	5:27:07 PM	SiCl4 MFC set to  0.000000
2/12/2013	5:27:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2013	5:27:07 PM	Tube furnace set to 150
